FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4313406774> ?p ?o ?g. }

• W4313406774 endingPage "127058" @default.
• W4313406774 startingPage "127058" @default.
• W4313406774 abstract "TCS (SiHCl3) is widely used in the rapid growth of SiC. However, in the study of using TCS to grow 4H-SiC, the growth temperature is mainly concentrated in 1550–1650 °C, and the research on lower growth temperature is lacking. In this study, TCS was used as the silicon precursor and epitaxial layers were grown in the temperature range of 1350–1500 °C. The results show that the single crystal type 4H-SiC epitaxial layer with good quality can be obtained at the growth temperature of 1450 ℃." @default.
• W4313406774 created "2023-01-06" @default.
• W4313406774 creator A5000130762 @default.
• W4313406774 creator A5007755497 @default.
• W4313406774 creator A5022802322 @default.
• W4313406774 creator A5037808552 @default.
• W4313406774 creator A5041000097 @default.
• W4313406774 creator A5057802244 @default.
• W4313406774 creator A5058903146 @default.
• W4313406774 creator A5067082665 @default.
• W4313406774 creator A5071235043 @default.
• W4313406774 creator A5073548180 @default.
• W4313406774 creator A5083257120 @default.
• W4313406774 date "2023-06-01" @default.
• W4313406774 modified "2023-10-18" @default.
• W4313406774 title "Growth of 4H-SiC epitaxial layers at temperatures below 1500 °C using trichlorosilane (TCS)" @default.
• W4313406774 cites W1164467769 @default.
• W4313406774 cites W2019856065 @default.
• W4313406774 cites W2022266355 @default.
• W4313406774 cites W2029553851 @default.
• W4313406774 cites W2030623769 @default.
• W4313406774 cites W2046381472 @default.
• W4313406774 cites W2049221696 @default.
• W4313406774 cites W2094956071 @default.
• W4313406774 cites W2095462445 @default.
• W4313406774 cites W2159340584 @default.
• W4313406774 cites W2303055449 @default.
• W4313406774 cites W2571769993 @default.
• W4313406774 cites W2889651227 @default.
• W4313406774 cites W2897080959 @default.
• W4313406774 cites W3091262637 @default.
• W4313406774 cites W3206029147 @default.
• W4313406774 cites W4213325984 @default.
• W4313406774 cites W4281259214 @default.
• W4313406774 cites W4283070383 @default.
• W4313406774 cites W4285116844 @default.
• W4313406774 doi "https://doi.org/10.1016/j.jcrysgro.2022.127058" @default.
• W4313406774 hasPublicationYear "2023" @default.
• W4313406774 type Work @default.
• W4313406774 citedByCount "2" @default.
• W4313406774 countsByYear W43134067742023 @default.
• W4313406774 crossrefType "journal-article" @default.
• W4313406774 hasAuthorship W4313406774A5000130762 @default.
• W4313406774 hasAuthorship W4313406774A5007755497 @default.
• W4313406774 hasAuthorship W4313406774A5022802322 @default.
• W4313406774 hasAuthorship W4313406774A5037808552 @default.
• W4313406774 hasAuthorship W4313406774A5041000097 @default.
• W4313406774 hasAuthorship W4313406774A5057802244 @default.
• W4313406774 hasAuthorship W4313406774A5058903146 @default.
• W4313406774 hasAuthorship W4313406774A5067082665 @default.
• W4313406774 hasAuthorship W4313406774A5071235043 @default.
• W4313406774 hasAuthorship W4313406774A5073548180 @default.
• W4313406774 hasAuthorship W4313406774A5083257120 @default.
• W4313406774 hasConcept C110738630 @default.
• W4313406774 hasConcept C121332964 @default.
• W4313406774 hasConcept C159985019 @default.
• W4313406774 hasConcept C171250308 @default.
• W4313406774 hasConcept C185592680 @default.
• W4313406774 hasConcept C192562407 @default.
• W4313406774 hasConcept C26456737 @default.
• W4313406774 hasConcept C2779227376 @default.
• W4313406774 hasConcept C2779248272 @default.
• W4313406774 hasConcept C2780722187 @default.
• W4313406774 hasConcept C39353612 @default.
• W4313406774 hasConcept C49040817 @default.
• W4313406774 hasConcept C544956773 @default.
• W4313406774 hasConcept C8010536 @default.
• W4313406774 hasConcept C97355855 @default.
• W4313406774 hasConceptScore W4313406774C110738630 @default.
• W4313406774 hasConceptScore W4313406774C121332964 @default.
• W4313406774 hasConceptScore W4313406774C159985019 @default.
• W4313406774 hasConceptScore W4313406774C171250308 @default.
• W4313406774 hasConceptScore W4313406774C185592680 @default.
• W4313406774 hasConceptScore W4313406774C192562407 @default.
• W4313406774 hasConceptScore W4313406774C26456737 @default.
• W4313406774 hasConceptScore W4313406774C2779227376 @default.
• W4313406774 hasConceptScore W4313406774C2779248272 @default.
• W4313406774 hasConceptScore W4313406774C2780722187 @default.
• W4313406774 hasConceptScore W4313406774C39353612 @default.
• W4313406774 hasConceptScore W4313406774C49040817 @default.
• W4313406774 hasConceptScore W4313406774C544956773 @default.
• W4313406774 hasConceptScore W4313406774C8010536 @default.
• W4313406774 hasConceptScore W4313406774C97355855 @default.
• W4313406774 hasFunder F4320321001 @default.
• W4313406774 hasFunder F4320322847 @default.
• W4313406774 hasFunder F4320335626 @default.
• W4313406774 hasFunder F4320335777 @default.
• W4313406774 hasFunder F4320336405 @default.
• W4313406774 hasLocation W43134067741 @default.
• W4313406774 hasOpenAccess W4313406774 @default.
• W4313406774 hasPrimaryLocation W43134067741 @default.
• W4313406774 hasRelatedWork W1982635368 @default.
• W4313406774 hasRelatedWork W2001429041 @default.
• W4313406774 hasRelatedWork W2006052731 @default.
• W4313406774 hasRelatedWork W2026734074 @default.
• W4313406774 hasRelatedWork W2043128672 @default.
• W4313406774 hasRelatedWork W2059986347 @default.
• W4313406774 hasRelatedWork W2115046010 @default.

• next