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- W4313443195 abstract "We demonstrate a method to emulate the optical performance of silicon photonic devices fabricated using advanced deep-ultraviolet lithography (DUV) processes on a rapid-prototyping electron-beam lithography process. The method is enabled by a computational lithography predictive model generated by processing SEM image data of the DUV lithography process. We experimentally demonstrate the emulation method’s accuracy on integrated silicon Bragg grating waveguides and grating-based, add-drop filter devices, two devices that are particularly susceptible to DUV lithography effects. The emulation method allows silicon photonic device and system designers to experimentally observe the effects of DUV lithography on device performance in a low-cost, rapid-prototyping, electron-beam lithography process to enable a first-time-right design flow." @default.
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- W4313443195 date "2023-01-18" @default.
- W4313443195 modified "2023-10-18" @default.
- W4313443195 title "Emulation of deep-ultraviolet lithography using rapid-prototyping, electron-beam lithography for silicon photonics design" @default.
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- W4313443195 doi "https://doi.org/10.1364/ol.478212" @default.
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