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- W4313446565 abstract "Contaminant particles affect the performance and yield of end products in widely diverse industries. These particles adhere very strongly to the surface and cannot be easily removed. Following a brief review of the adhesion of particles, methods for their removal will be described. Current wet chemical and aqueous cleaning methods are reaching their physical and chemical limits to efficiently remove small particles. Alternative non-aqueous precision cleaning techniques have been developed for effectively removing small particles and/or contaminant films. Many of these methods have been commercialized, while other methods are in pre-commercialization or research and development stages. Recent developments in these removal methods are summarized. Two promising methods for characterizing submicrometer particles, scanning near field optical microscopy and hot electron microcalorimeter x-ray spectroscopy, are also discussed." @default.
- W4313446565 created "2023-01-06" @default.
- W4313446565 creator A5032320330 @default.
- W4313446565 date "2023-01-03" @default.
- W4313446565 modified "2023-10-16" @default.
- W4313446565 title "Adhesion of small particles and innovative methods for their removal" @default.
- W4313446565 doi "https://doi.org/10.1201/9780429070716-10" @default.
- W4313446565 hasPublicationYear "2023" @default.
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