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- W4313462542 abstract "The work presents the results of RF deposition of germanium/carbon films from tetramethylgermanium and from tetraethylgermanium in a small volume parallel plate reactor. Films deposited at W/FM values below 0.6 GJ/ kg are transparent, soft and insulating polymer-like layers of low density. Materials produced at W/FM over 0.8 GJ/kg are dense and hard, black in colour, semiconducting layers. Electrical conductivity measurements show that the DC conductivity of the semiconducting films amounts up to 10−2 S/m, with the thermal activation energy amounting up to 0.9 eV. Optical gap measurements suggest a significant tunability of the forbidden bands of these materials. Thermogravimetric measurements reveal high thermal stability of the annealed semiconducting films. Two-dimensional models of the chemical structures of both polymer-like and hard materials are proposed on the basis of FTIR and 13C CP-MAS-NMR measurements." @default.
- W4313462542 created "2023-01-06" @default.
- W4313462542 creator A5030292701 @default.
- W4313462542 date "2023-01-03" @default.
- W4313462542 modified "2023-09-29" @default.
- W4313462542 title "Radiofrequency plasma deposition of Ge/C films from tetraalkylgermanium derivatives" @default.
- W4313462542 doi "https://doi.org/10.1201/9780429070419-35" @default.
- W4313462542 hasPublicationYear "2023" @default.
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