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- W4313484865 abstract "Manufacturing advances in the field of micro-electro-mechanical systems (MEMS) enabled the realization of MEMS mirrors. These MEMS mirrors, which are as small as a few square millimeter, are promising candidates for various types of automotive applications requiring laser beam steering. Prime application examples are Head-Up Displays (HUD) or Light Detection and Ranging (LiDAR) sensors. In this work, we present the latest advancements and concepts for sensing, actuating, and controlling oscillating comb-drive based MEMS mirrors. Also an efficient approach towards high-voltage generation and actuation is presented which is capable to reduce the MEMS mirror's power dissipation by factors. Furthermore, the performance of the presented control system is depicted by means of an automotive LiDAR use-case which was integrated into an automated demo vehicle." @default.
- W4313484865 created "2023-01-06" @default.
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- W4313484865 date "2022-08-01" @default.
- W4313484865 modified "2023-09-27" @default.
- W4313484865 title "Sense and Control of Oscillating MEMS Mirrors" @default.
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- W4313484865 doi "https://doi.org/10.1109/dsd57027.2022.00102" @default.
- W4313484865 hasPublicationYear "2022" @default.
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