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• W4313485002 abstract "The development of automation at the nanoscale has been calling for precision motion sensing for robotic nanopositioners. This study presents a microvision-based measurement system for the accurate and efficient motion sensing of three-degree-of-freedom (DOF) nanopositioners. In this measurement system, an optimized target searching (OTS) scheme is proposed for automatic tracking target selection. A strategy is designed to combine feature matching with phase correlation to balance the measurement accuracy and efficiency. By proposing a multiple target tracking scheme, high-precision angular measurement is achieved, and velocity estimation is also provided in this microvision-based measurement system. Subsequently, offline simulations and online experiments are performed to comprehensively evaluate the performances of the microvision-based system with comparisons to traditional instrumentation. The simulation and experimental results demonstrate that the proposed system and marker-free method can realize excellent extensibility, strong robustness, and high precision of motion tracking for the nanopositioners, with measurement accuracy higher than 93 nm and 96 <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$mu $ </tex-math></inline-formula> rad." @default.
• W4313485002 created "2023-01-06" @default.
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• W4313485002 date "2023-01-01" @default.
• W4313485002 modified "2023-10-14" @default.
• W4313485002 title "A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method" @default.
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• W4313485002 doi "https://doi.org/10.1109/tim.2023.3234038" @default.
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