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- W4313558215 endingPage "616" @default.
- W4313558215 startingPage "586" @default.
- W4313558215 abstract "Amorphous carbon (a-C) films have garnered significant attention over the past few decades, principally due to their remarkable thermophysical properties, strong adherence to various materials, and good chemical inertness. These intrinsic characteristics of a-C films have led to their use as protective overcoats in numerous applications, such as hard-disk drives, microelectromechanical systems, and biomedical implants. The significant thinning of a-C films to a few nanometers, dictated by rapid advances in device miniaturization and compactness, motivated the development of thin-film deposition methods that preserve important film attributes like uniformity, strength, and structural stability. This article provides a comprehensive assessment of the most effective deposition techniques for synthesizing ultrathin films, particularly a-C films due to their wide application range as protective overcoats in contemporary technologies, state-of-the-art microanalysis methods for ultrathin films, and the technology challenges that must be overcome for CVA to capture a bigger share of the thin-film technology marketplace." @default.
- W4313558215 created "2023-01-06" @default.
- W4313558215 creator A5073133103 @default.
- W4313558215 creator A5077089303 @default.
- W4313558215 creator A5085102760 @default.
- W4313558215 date "2023-01-05" @default.
- W4313558215 modified "2023-10-16" @default.
- W4313558215 title "A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique" @default.
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