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- W4313574341 abstract "Non-dispersive infrared (NDIR) absorption spectroscopy is a widespread approach to gas sensing due to its selectivity and conceptual simplicity. One of the main challenges towards the development of fully integrated NDIR sensors is the design and fabrication of microstructures, typically waveguides, that can combine high sensitivity with the ease of integrability of other sensor elements (sources, filters, detectors). Here, we investigate theoretically and experimentally a class of coupled strip-array (CSA) waveguides realized on a SiO2/Si3N4 platform with mass semiconductor fabrication processes. We demonstrate that this class of waveguides shows comparable sensitivity for a wide range of presented geometries, making it a very promising platform for satisfying multiple sensor and fabrication requirements without loss of performance." @default.
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- W4313574341 date "2023-01-04" @default.
- W4313574341 modified "2023-09-26" @default.
- W4313574341 title "Coupled Strip-Array Waveguides for Integrated Mid-IR Gas Sensing" @default.
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- W4313574341 doi "https://doi.org/10.3390/photonics10010055" @default.
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