Matches in SemOpenAlex for { <https://semopenalex.org/work/W4313583385> ?p ?o ?g. }
- W4313583385 endingPage "91" @default.
- W4313583385 startingPage "91" @default.
- W4313583385 abstract "As semiconductors’ device fabrication is highly integrated, the number of the deposition processes is continuously increasing, and the chamber cleaning process becomes essential for deposition equipment to maintain a normal chamber condition. Although the use of NF3 gas for the chamber cleaning is common, it causes several environmental and safety issues. However, not much research has been performed on NF3 plasma at high pressures, such as in cleaning processes. To understand fluorine in NF3, herein, oxygen was added to N2 and NF3 plasma and then compared. Plasma emission spectra were compared using an OES data, and their analyses were performed via a line-ratio method employing the collisional-radiative model. As a result confirmed that the changes in electron temperature, electron density, and chemical species in the plasma could be explained. Additionally, the characteristics of NF3 plasmas with respect to fluorine were confirmed by comparing the oxygenated N2 plasma and the NF3 plasma." @default.
- W4313583385 created "2023-01-06" @default.
- W4313583385 creator A5048633773 @default.
- W4313583385 creator A5088574413 @default.
- W4313583385 date "2023-01-03" @default.
- W4313583385 modified "2023-10-01" @default.
- W4313583385 title "Spectroscopic Analysis of NF3 Plasmas with Oxygen Additive for PECVD Chamber Cleaning" @default.
- W4313583385 cites W1969156718 @default.
- W4313583385 cites W1975841138 @default.
- W4313583385 cites W1984803626 @default.
- W4313583385 cites W1996706925 @default.
- W4313583385 cites W1997593959 @default.
- W4313583385 cites W1998323959 @default.
- W4313583385 cites W2009559377 @default.
- W4313583385 cites W2028286614 @default.
- W4313583385 cites W2030004459 @default.
- W4313583385 cites W2037119722 @default.
- W4313583385 cites W2037618560 @default.
- W4313583385 cites W2039097144 @default.
- W4313583385 cites W2040618728 @default.
- W4313583385 cites W2052810028 @default.
- W4313583385 cites W2071477973 @default.
- W4313583385 cites W2077740094 @default.
- W4313583385 cites W2081876306 @default.
- W4313583385 cites W2084037775 @default.
- W4313583385 cites W2090549776 @default.
- W4313583385 cites W2170327781 @default.
- W4313583385 cites W2521572958 @default.
- W4313583385 cites W2614547689 @default.
- W4313583385 cites W2623907268 @default.
- W4313583385 cites W2763348608 @default.
- W4313583385 cites W2787953151 @default.
- W4313583385 cites W2790409533 @default.
- W4313583385 cites W2907839445 @default.
- W4313583385 cites W2912796204 @default.
- W4313583385 cites W2944342215 @default.
- W4313583385 cites W2947865373 @default.
- W4313583385 cites W2976603195 @default.
- W4313583385 cites W2997838859 @default.
- W4313583385 cites W3003503057 @default.
- W4313583385 cites W3004084857 @default.
- W4313583385 cites W3006059575 @default.
- W4313583385 cites W3021271527 @default.
- W4313583385 cites W3108446705 @default.
- W4313583385 cites W3005907461 @default.
- W4313583385 doi "https://doi.org/10.3390/coatings13010091" @default.
- W4313583385 hasPublicationYear "2023" @default.
- W4313583385 type Work @default.
- W4313583385 citedByCount "0" @default.
- W4313583385 crossrefType "journal-article" @default.
- W4313583385 hasAuthorship W4313583385A5048633773 @default.
- W4313583385 hasAuthorship W4313583385A5088574413 @default.
- W4313583385 hasBestOaLocation W43135833851 @default.
- W4313583385 hasConcept C107872376 @default.
- W4313583385 hasConcept C113196181 @default.
- W4313583385 hasConcept C121332964 @default.
- W4313583385 hasConcept C125485243 @default.
- W4313583385 hasConcept C136525101 @default.
- W4313583385 hasConcept C142724271 @default.
- W4313583385 hasConcept C151730666 @default.
- W4313583385 hasConcept C178790620 @default.
- W4313583385 hasConcept C185592680 @default.
- W4313583385 hasConcept C204787440 @default.
- W4313583385 hasConcept C2780740191 @default.
- W4313583385 hasConcept C2816523 @default.
- W4313583385 hasConcept C38347018 @default.
- W4313583385 hasConcept C506198293 @default.
- W4313583385 hasConcept C540031477 @default.
- W4313583385 hasConcept C57410435 @default.
- W4313583385 hasConcept C60581705 @default.
- W4313583385 hasConcept C62520636 @default.
- W4313583385 hasConcept C64297162 @default.
- W4313583385 hasConcept C71924100 @default.
- W4313583385 hasConcept C82706917 @default.
- W4313583385 hasConcept C86803240 @default.
- W4313583385 hasConceptScore W4313583385C107872376 @default.
- W4313583385 hasConceptScore W4313583385C113196181 @default.
- W4313583385 hasConceptScore W4313583385C121332964 @default.
- W4313583385 hasConceptScore W4313583385C125485243 @default.
- W4313583385 hasConceptScore W4313583385C136525101 @default.
- W4313583385 hasConceptScore W4313583385C142724271 @default.
- W4313583385 hasConceptScore W4313583385C151730666 @default.
- W4313583385 hasConceptScore W4313583385C178790620 @default.
- W4313583385 hasConceptScore W4313583385C185592680 @default.
- W4313583385 hasConceptScore W4313583385C204787440 @default.
- W4313583385 hasConceptScore W4313583385C2780740191 @default.
- W4313583385 hasConceptScore W4313583385C2816523 @default.
- W4313583385 hasConceptScore W4313583385C38347018 @default.
- W4313583385 hasConceptScore W4313583385C506198293 @default.
- W4313583385 hasConceptScore W4313583385C540031477 @default.
- W4313583385 hasConceptScore W4313583385C57410435 @default.
- W4313583385 hasConceptScore W4313583385C60581705 @default.
- W4313583385 hasConceptScore W4313583385C62520636 @default.
- W4313583385 hasConceptScore W4313583385C64297162 @default.
- W4313583385 hasConceptScore W4313583385C71924100 @default.
- W4313583385 hasConceptScore W4313583385C82706917 @default.
- W4313583385 hasConceptScore W4313583385C86803240 @default.
- W4313583385 hasFunder F4320334879 @default.