FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4313593130> ?p ?o ?g. }

• W4313593130 endingPage "139656" @default.
• W4313593130 startingPage "139656" @default.
• W4313593130 abstract "With the urgent demands of characterizing the optical properties and thicknesses of nano-films in some micron-scale trenches usually emerging in integrated circuit manufacturing, the micro-spot Mueller matrix ellipsometer (M-MME) has attracted increasingly more attention. While using a lens pair to enable a probing spot with a micron scale in the M-MME, the additional polarization effects caused by the lens pair usually degrade the measurement precision of the instrument. Therefore, it is of great significance to calibrate the polarization effects of the lens pair for measurement precision improvement. In this work, a parametric model based on the Mueller matrix decomposition has been proposed to fully describe the polarization effects of a focusing lens pair in the M-MME. A single lens in the focusing lens pair could be optical equivalent to a cascade system consisting of a circular retarder with slight diattenuation, a linear retarder with small diattenuation, a rotator, and a depolarizer. Correspondingly, a comprehensive calibration method combining an initial offline and a subsequent in-situ calibration was proposed to achieve the ingenious correction of polarization effects for the lens pair in the self-built M-MME. Meanwhile, in order to demonstrate the effectiveness and feasibility of the proposed method, a series of thickness measurement experiments on SiO2 films have been carried out. The corresponding results indicate that the proposed calibration method could improve the relative deviation between the thickness measured by the self-built M-MME and those measured by the commercial MME to within 1.6% for those SiO2 films with thickness larger than 25 nm." @default.
• W4313593130 created "2023-01-06" @default.
• W4313593130 creator A5006553874 @default.
• W4313593130 creator A5008096537 @default.
• W4313593130 creator A5030683638 @default.
• W4313593130 creator A5039192557 @default.
• W4313593130 creator A5053570676 @default.
• W4313593130 date "2023-02-01" @default.
• W4313593130 modified "2023-09-25" @default.
• W4313593130 title "Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer" @default.
• W4313593130 cites W1969799788 @default.
• W4313593130 cites W1973945917 @default.
• W4313593130 cites W1984187831 @default.
• W4313593130 cites W1987799947 @default.
• W4313593130 cites W2038448609 @default.
• W4313593130 cites W2044182862 @default.
• W4313593130 cites W2051939306 @default.
• W4313593130 cites W2071555709 @default.
• W4313593130 cites W2084561747 @default.
• W4313593130 cites W2101672522 @default.
• W4313593130 cites W2119650477 @default.
• W4313593130 cites W2133785712 @default.
• W4313593130 cites W2163348294 @default.
• W4313593130 cites W2559718067 @default.
• W4313593130 cites W2576835667 @default.
• W4313593130 cites W2804157818 @default.
• W4313593130 cites W2886822638 @default.
• W4313593130 cites W2891383259 @default.
• W4313593130 cites W2897607471 @default.
• W4313593130 cites W2899753974 @default.
• W4313593130 cites W2902271400 @default.
• W4313593130 cites W2911620139 @default.
• W4313593130 cites W2971918848 @default.
• W4313593130 cites W3020989554 @default.
• W4313593130 cites W3158389949 @default.
• W4313593130 cites W3162196346 @default.
• W4313593130 cites W3177605062 @default.
• W4313593130 cites W3188340548 @default.
• W4313593130 cites W4224320536 @default.
• W4313593130 cites W4283580399 @default.
• W4313593130 cites W4293790283 @default.
• W4313593130 cites W4294733406 @default.
• W4313593130 cites W4308512359 @default.
• W4313593130 doi "https://doi.org/10.1016/j.tsf.2022.139656" @default.
• W4313593130 hasPublicationYear "2023" @default.
• W4313593130 type Work @default.
• W4313593130 citedByCount "1" @default.
• W4313593130 countsByYear W43135931302023 @default.
• W4313593130 crossrefType "journal-article" @default.
• W4313593130 hasAuthorship W4313593130A5006553874 @default.
• W4313593130 hasAuthorship W4313593130A5008096537 @default.
• W4313593130 hasAuthorship W4313593130A5030683638 @default.
• W4313593130 hasAuthorship W4313593130A5039192557 @default.
• W4313593130 hasAuthorship W4313593130A5053570676 @default.
• W4313593130 hasConcept C105795698 @default.
• W4313593130 hasConcept C117251300 @default.
• W4313593130 hasConcept C120665830 @default.
• W4313593130 hasConcept C121332964 @default.
• W4313593130 hasConcept C147789679 @default.
• W4313593130 hasConcept C15336307 @default.
• W4313593130 hasConcept C159985019 @default.
• W4313593130 hasConcept C165838908 @default.
• W4313593130 hasConcept C171250308 @default.
• W4313593130 hasConcept C18293161 @default.
• W4313593130 hasConcept C185592680 @default.
• W4313593130 hasConcept C19067145 @default.
• W4313593130 hasConcept C191486275 @default.
• W4313593130 hasConcept C192562407 @default.
• W4313593130 hasConcept C205049153 @default.
• W4313593130 hasConcept C28493345 @default.
• W4313593130 hasConcept C33107880 @default.
• W4313593130 hasConcept C33923547 @default.
• W4313593130 hasConcept C36928386 @default.
• W4313593130 hasConcept C62520636 @default.
• W4313593130 hasConceptScore W4313593130C105795698 @default.
• W4313593130 hasConceptScore W4313593130C117251300 @default.
• W4313593130 hasConceptScore W4313593130C120665830 @default.
• W4313593130 hasConceptScore W4313593130C121332964 @default.
• W4313593130 hasConceptScore W4313593130C147789679 @default.
• W4313593130 hasConceptScore W4313593130C15336307 @default.
• W4313593130 hasConceptScore W4313593130C159985019 @default.
• W4313593130 hasConceptScore W4313593130C165838908 @default.
• W4313593130 hasConceptScore W4313593130C171250308 @default.
• W4313593130 hasConceptScore W4313593130C18293161 @default.
• W4313593130 hasConceptScore W4313593130C185592680 @default.
• W4313593130 hasConceptScore W4313593130C19067145 @default.
• W4313593130 hasConceptScore W4313593130C191486275 @default.
• W4313593130 hasConceptScore W4313593130C192562407 @default.
• W4313593130 hasConceptScore W4313593130C205049153 @default.
• W4313593130 hasConceptScore W4313593130C28493345 @default.
• W4313593130 hasConceptScore W4313593130C33107880 @default.
• W4313593130 hasConceptScore W4313593130C33923547 @default.
• W4313593130 hasConceptScore W4313593130C36928386 @default.
• W4313593130 hasConceptScore W4313593130C62520636 @default.
• W4313593130 hasLocation W43135931301 @default.
• W4313593130 hasOpenAccess W4313593130 @default.
• W4313593130 hasPrimaryLocation W43135931301 @default.
• W4313593130 hasRelatedWork W2009533442 @default.

• next