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- W4313598593 abstract "We report a novel process variation-aware compact model of strip waveguides that is suitable for circuit-level simulation of waveguide-based process design kit (PDK) elements. The model is shown to describe both loss and -- using a novel expression for the thermo-optic effect in high index contrast materials -- the thermo-optic behavior of strip waveguides. A novel group extraction method enables modeling the effective index's ($n_{mathrm{eff}}$) sensitivity to local process variations without the presumption of variation source. Use of Euler-bend Mach-Zehnder interferometers (MZIs) fabricated in a 300~mm wafer run allow model parameter extraction at widths up to 2.5~$mu$m (highly multi-mode) with strong suppression of higher-order mode excitation. Experimental results prove the reported model can self-consistently describe waveguide phase, loss, and thermo-optic behavior across all measured devices over an unprecedented range of optical bandwidth, waveguide widths, and temperatures." @default.
- W4313598593 created "2023-01-06" @default.
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- W4313598593 date "2023-01-04" @default.
- W4313598593 modified "2023-10-18" @default.
- W4313598593 title "Process Variation-Aware Compact Model of Strip Waveguides for Photonic Circuit Simulation" @default.
- W4313598593 doi "https://doi.org/10.48550/arxiv.2301.01689" @default.
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