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- W4313647492 abstract "We demonstrate a miniaturized wafer-scale optical gas sensor that combines the gas cell, an optical filter, and integrated flow channels. We present the design, fabrication and characterization of an integrated cavity-enhanced sensor. Using the module, we demonstrate absorption sensing of ethylene down to 100 ppm level." @default.
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- W4313647492 date "2023-03-09" @default.
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- W4313647492 title "Thin-film wafer-scale mid-IR Fabry Perot cavity gas sensor" @default.
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- W4313647492 doi "https://doi.org/10.1364/oe.477571" @default.
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