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• W4313647923 abstract "Abstract Photonic integrated circuits are indispensable for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing 1 . New applications and higher performance are enabled by the diversification of optical waveguide materials past silicon-on-insulator. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching 2 . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s 3 and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. Its use today is pervasive, ranging from applications for hard disk surfaces 4 and medical devices 5 to low friction coatings for automotive components 6 . It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 4 dB/m and Q-factor as high as 10 · 10 6 . In contrast to widely employed ridge waveguides 7,8 , this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with sub-kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of high density ferroelectric photonic integrated circuits, in particular for applications in coherent laser based ranging 9 and beamforming 10 , optical communications 7 , and classical 11 and quantum computing networks 12 ." @default.
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• W4313647923 date "2023-01-06" @default.
• W4313647923 modified "2023-10-14" @default.
• W4313647923 title "High density lithium niobate photonic integrated circuits and lasers" @default.
• W4313647923 doi "https://doi.org/10.21203/rs.3.rs-2391256/v1" @default.
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