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- W4313648503 abstract "Abstract Ultrafast laser processing can induce surface nanostructurating (SNS) in most materials with dimensions close to the irradiation laser wavelength. In-situ SNS characterization could be key for laser parameter’s fine-tuning, essential for the generation of complex and/or hybrid nanostructures. Laser Induced Periodic Surface Structures (LIPSS) created in the ultra-violet (UV) range generate the most fascinating effects. They are however highly challenging to characterize in a non-destructive manner since their dimensions can be as small as 100 nm. Conventional optical imaging methods are indeed limited by diffraction to a resolution of ≈ 150 nm. Although optical super-resolution techniques can go beyond the diffraction limit, which in theory allows the visualization of LIPSS, most super-resolution methods require the presence of small probes (such as fluorophores) which modifies the sample and is usually incompatible with a direct surface inspection. In this paper, we demonstrate that a modified label-free Confocal Reflectance Microscope (CRM) in a photon reassignment regime (also called re-scan microscopy) can detect sub-diffraction limit LIPSS. SNS generated on a titanium sample irradiated with a λ=257 nm femtosecond UV-laser were characterized with nanostructuring period ranging from 105 nm to 172 nm. Our label-free, non-destructive optical surface inspection was done at 180μm²/s, and the results are compared with commercial SEM showing the metrological efficiency of our approach." @default.
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- W4313648503 date "2023-01-06" @default.
- W4313648503 modified "2023-10-18" @default.
- W4313648503 title "Nondestructive inspection of surface nanostructuring using label-free optical super-resolution imaging" @default.
- W4313648503 doi "https://doi.org/10.21203/rs.3.rs-2397646/v1" @default.
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