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• W4313657013 endingPage "107311" @default.
• W4313657013 startingPage "107311" @default.
• W4313657013 abstract "Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces for many applications. Arrays of silicon 3D nanostructures are needed to realize photonic and phononic crystals, waveguides, metalenses, X-ray wavefront sensors, detectors. In particular, arrays of Si nanopillars are used as bio-interfaces in neural activity recording, cell culture, microfluidics, sensing and on-chip manipulation. Here, we demonstrate a strategy for realizing arrays of protruding sharp Si nanopillars, using displacement Talbot lithography combined with metal-assisted chemical etching (MacEtch) in gas phase. Such combination enables reliable and low cost pathway for fabrication of ordered nanopillars arrays on large scale. With the double exposure of a linear grating mask in orthogonal orientations and the lift-off technique, we realized a catalyst pattern of holes in a Pt thin film with a period of 1 μm and hole diameter in the range of 100–250 nm. MacEtch in gas phase by using vapor HF and oxygen from air allows to etch arrays of protruding Si nanopillars 200 nm-thick and aspect ratio in the range of 200 (pillar height/width) with an etching rate up to 1 μm/min. Gas-MacEtch has the advantage of no capillary stiction, no ion beam damage of the Si substrate, nanometric resolution and high fidelity of pattern transfer. In combination with controlled uniformity of feature size on large area, spatial frequency doubling and high resolution of Talbot lithography, the proposed method is an easy-to-scale-up processing that can support the fabrication of Si pillars arrays for many valuable applications both at micro and nano-scale." @default.
• W4313657013 created "2023-01-07" @default.
• W4313657013 creator A5002647826 @default.
• W4313657013 creator A5006399818 @default.
• W4313657013 creator A5052841360 @default.
• W4313657013 creator A5090410721 @default.
• W4313657013 date "2023-04-01" @default.
• W4313657013 modified "2023-09-26" @default.
• W4313657013 title "High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch" @default.
• W4313657013 cites W1979969014 @default.
• W4313657013 cites W1981551550 @default.
• W4313657013 cites W1997913942 @default.
• W4313657013 cites W1999727418 @default.
• W4313657013 cites W2020197664 @default.
• W4313657013 cites W2023579904 @default.
• W4313657013 cites W2026346938 @default.
• W4313657013 cites W2028285928 @default.
• W4313657013 cites W2037152301 @default.
• W4313657013 cites W2045107740 @default.
• W4313657013 cites W2054924910 @default.
• W4313657013 cites W2068276297 @default.
• W4313657013 cites W2084371586 @default.
• W4313657013 cites W2089486737 @default.
• W4313657013 cites W2124043346 @default.
• W4313657013 cites W2135284662 @default.
• W4313657013 cites W2149789246 @default.
• W4313657013 cites W2151968912 @default.
• W4313657013 cites W2281905945 @default.
• W4313657013 cites W2328221192 @default.
• W4313657013 cites W2340717854 @default.
• W4313657013 cites W2342997113 @default.
• W4313657013 cites W2401080870 @default.
• W4313657013 cites W2514657051 @default.
• W4313657013 cites W2587092028 @default.
• W4313657013 cites W2743538572 @default.
• W4313657013 cites W2776670879 @default.
• W4313657013 cites W2779656956 @default.
• W4313657013 cites W2793950303 @default.
• W4313657013 cites W2890073753 @default.
• W4313657013 cites W2897798547 @default.
• W4313657013 cites W2949705700 @default.
• W4313657013 cites W2954402349 @default.
• W4313657013 cites W2955390192 @default.
• W4313657013 cites W2969303812 @default.
• W4313657013 cites W2974349096 @default.
• W4313657013 cites W2979768905 @default.
• W4313657013 cites W2981204842 @default.
• W4313657013 cites W2984507090 @default.
• W4313657013 cites W3000645697 @default.
• W4313657013 cites W3007279777 @default.
• W4313657013 cites W3011035326 @default.
• W4313657013 cites W3031311700 @default.
• W4313657013 cites W3033631465 @default.
• W4313657013 cites W3035429051 @default.
• W4313657013 cites W3039602780 @default.
• W4313657013 cites W3087336309 @default.
• W4313657013 cites W3096420039 @default.
• W4313657013 cites W3115202868 @default.
• W4313657013 cites W3116510029 @default.
• W4313657013 cites W3118469072 @default.
• W4313657013 cites W3127445263 @default.
• W4313657013 cites W3163672538 @default.
• W4313657013 cites W3189936621 @default.
• W4313657013 cites W3190118328 @default.
• W4313657013 cites W4205396199 @default.
• W4313657013 cites W4213315347 @default.
• W4313657013 cites W4214911578 @default.
• W4313657013 cites W4220874937 @default.
• W4313657013 cites W4224237762 @default.
• W4313657013 cites W4245796559 @default.
• W4313657013 cites W4285586499 @default.
• W4313657013 cites W4291736477 @default.
• W4313657013 cites W4295086510 @default.
• W4313657013 doi "https://doi.org/10.1016/j.mssp.2023.107311" @default.
• W4313657013 hasPublicationYear "2023" @default.
• W4313657013 type Work @default.
• W4313657013 citedByCount "1" @default.
• W4313657013 countsByYear W43136570132023 @default.
• W4313657013 crossrefType "journal-article" @default.
• W4313657013 hasAuthorship W4313657013A5002647826 @default.
• W4313657013 hasAuthorship W4313657013A5006399818 @default.
• W4313657013 hasAuthorship W4313657013A5052841360 @default.
• W4313657013 hasAuthorship W4313657013A5090410721 @default.
• W4313657013 hasBestOaLocation W43136570131 @default.
• W4313657013 hasConcept C100460472 @default.
• W4313657013 hasConcept C120665830 @default.
• W4313657013 hasConcept C121332964 @default.
• W4313657013 hasConcept C1291036 @default.
• W4313657013 hasConcept C130472188 @default.
• W4313657013 hasConcept C136525101 @default.
• W4313657013 hasConcept C142724271 @default.
• W4313657013 hasConcept C171250308 @default.
• W4313657013 hasConcept C186187911 @default.
• W4313657013 hasConcept C192562407 @default.
• W4313657013 hasConcept C200274948 @default.
• W4313657013 hasConcept C204223013 @default.
• W4313657013 hasConcept C204787440 @default.
• W4313657013 hasConcept C25479853 @default.

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