Matches in SemOpenAlex for { <https://semopenalex.org/work/W4313856452> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W4313856452 endingPage "111936" @default.
- W4313856452 startingPage "111936" @default.
- W4313856452 abstract "We report a versatile method for improving post-bonding wafer alignment accuracy and BCB thickness uniformity in stacks bonded with soft-baked BCB. It is based on novel BCB-based micro-pillars that act as anchors during bonding. The anchor structures become a natural part of the bonding interface therefore causing minimal interference to the optical, electrical and mechanical properties of the bonded stack. We studied these properties for fixed anchor density and various anchor heights with respect to the adhesive BCB thickness. We demonstrated that the alignment accuracy can be improved by approximately an order of magnitude and approach the fundamental pre-bond alignment accuracy by the tool. We also demonstrated that this technique is effective for a large range of BCB thicknesses of 2–16 μm. Furthermore we observed that the thickness non-uniformities were reduced by a factor of 2–3 × for BCB thicknesses in the 8–16 μm range." @default.
- W4313856452 created "2023-01-10" @default.
- W4313856452 creator A5004555747 @default.
- W4313856452 creator A5027388008 @default.
- W4313856452 creator A5038655453 @default.
- W4313856452 creator A5042485310 @default.
- W4313856452 creator A5086807471 @default.
- W4313856452 date "2023-02-01" @default.
- W4313856452 modified "2023-09-25" @default.
- W4313856452 title "Novel wafer-scale adhesive bonding with improved alignment accuracy and bond uniformity" @default.
- W4313856452 cites W1980631841 @default.
- W4313856452 cites W1984213746 @default.
- W4313856452 cites W2040946508 @default.
- W4313856452 cites W2045975144 @default.
- W4313856452 cites W2055333160 @default.
- W4313856452 cites W2120050778 @default.
- W4313856452 cites W2132358907 @default.
- W4313856452 cites W2144827696 @default.
- W4313856452 cites W2981960526 @default.
- W4313856452 cites W2992508722 @default.
- W4313856452 cites W3100904912 @default.
- W4313856452 cites W3112959174 @default.
- W4313856452 doi "https://doi.org/10.1016/j.mee.2023.111936" @default.
- W4313856452 hasPublicationYear "2023" @default.
- W4313856452 type Work @default.
- W4313856452 citedByCount "0" @default.
- W4313856452 crossrefType "journal-article" @default.
- W4313856452 hasAuthorship W4313856452A5004555747 @default.
- W4313856452 hasAuthorship W4313856452A5027388008 @default.
- W4313856452 hasAuthorship W4313856452A5038655453 @default.
- W4313856452 hasAuthorship W4313856452A5042485310 @default.
- W4313856452 hasAuthorship W4313856452A5086807471 @default.
- W4313856452 hasBestOaLocation W43138564521 @default.
- W4313856452 hasConcept C159985019 @default.
- W4313856452 hasConcept C160671074 @default.
- W4313856452 hasConcept C192562407 @default.
- W4313856452 hasConcept C199360897 @default.
- W4313856452 hasConcept C204323151 @default.
- W4313856452 hasConcept C2779133538 @default.
- W4313856452 hasConcept C2779227376 @default.
- W4313856452 hasConcept C2779278059 @default.
- W4313856452 hasConcept C41008148 @default.
- W4313856452 hasConcept C49040817 @default.
- W4313856452 hasConcept C68928338 @default.
- W4313856452 hasConcept C9395851 @default.
- W4313856452 hasConceptScore W4313856452C159985019 @default.
- W4313856452 hasConceptScore W4313856452C160671074 @default.
- W4313856452 hasConceptScore W4313856452C192562407 @default.
- W4313856452 hasConceptScore W4313856452C199360897 @default.
- W4313856452 hasConceptScore W4313856452C204323151 @default.
- W4313856452 hasConceptScore W4313856452C2779133538 @default.
- W4313856452 hasConceptScore W4313856452C2779227376 @default.
- W4313856452 hasConceptScore W4313856452C2779278059 @default.
- W4313856452 hasConceptScore W4313856452C41008148 @default.
- W4313856452 hasConceptScore W4313856452C49040817 @default.
- W4313856452 hasConceptScore W4313856452C68928338 @default.
- W4313856452 hasConceptScore W4313856452C9395851 @default.
- W4313856452 hasLocation W43138564521 @default.
- W4313856452 hasLocation W43138564522 @default.
- W4313856452 hasLocation W43138564523 @default.
- W4313856452 hasOpenAccess W4313856452 @default.
- W4313856452 hasPrimaryLocation W43138564521 @default.
- W4313856452 hasRelatedWork W2037443041 @default.
- W4313856452 hasRelatedWork W2040946508 @default.
- W4313856452 hasRelatedWork W2062450843 @default.
- W4313856452 hasRelatedWork W2148366851 @default.
- W4313856452 hasRelatedWork W2153160607 @default.
- W4313856452 hasRelatedWork W2607135174 @default.
- W4313856452 hasRelatedWork W3096077973 @default.
- W4313856452 hasRelatedWork W317242460 @default.
- W4313856452 hasRelatedWork W4376271918 @default.
- W4313856452 hasRelatedWork W90349556 @default.
- W4313856452 hasVolume "270" @default.
- W4313856452 isParatext "false" @default.
- W4313856452 isRetracted "false" @default.
- W4313856452 workType "article" @default.