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- W4313886467 abstract "We simulated a large-aperture capacitively coupled plasma (CCP) using a two-dimensional fluid model, and explored the effects of radio frequency, electrode power, and gas pressure on the period-averaged electron density and electron temperature. The influence and control ability of various discharge parameters on the plasma uniformity are analyzed, which provides reference for the selection of plasma process parameters." @default.
- W4313886467 created "2023-01-10" @default.
- W4313886467 creator A5010589202 @default.
- W4313886467 creator A5044936528 @default.
- W4313886467 creator A5062852782 @default.
- W4313886467 creator A5067989213 @default.
- W4313886467 creator A5090316501 @default.
- W4313886467 date "2023-01-09" @default.
- W4313886467 modified "2023-10-18" @default.
- W4313886467 title "Study on radial uniformity of large aperture capacitively coupled plasma" @default.
- W4313886467 cites W1967817937 @default.
- W4313886467 cites W1969852806 @default.
- W4313886467 cites W1976054111 @default.
- W4313886467 cites W2028474778 @default.
- W4313886467 cites W2089486737 @default.
- W4313886467 cites W3094351856 @default.
- W4313886467 doi "https://doi.org/10.1117/12.2653311" @default.
- W4313886467 hasPublicationYear "2023" @default.
- W4313886467 type Work @default.
- W4313886467 citedByCount "0" @default.
- W4313886467 crossrefType "proceedings-article" @default.
- W4313886467 hasAuthorship W4313886467A5010589202 @default.
- W4313886467 hasAuthorship W4313886467A5044936528 @default.
- W4313886467 hasAuthorship W4313886467A5062852782 @default.
- W4313886467 hasAuthorship W4313886467A5067989213 @default.
- W4313886467 hasAuthorship W4313886467A5090316501 @default.
- W4313886467 hasConcept C119599485 @default.
- W4313886467 hasConcept C121332964 @default.
- W4313886467 hasConcept C125485243 @default.
- W4313886467 hasConcept C127413603 @default.
- W4313886467 hasConcept C147120987 @default.
- W4313886467 hasConcept C17525397 @default.
- W4313886467 hasConcept C184779094 @default.
- W4313886467 hasConcept C192039680 @default.
- W4313886467 hasConcept C192562407 @default.
- W4313886467 hasConcept C24890656 @default.
- W4313886467 hasConcept C2778865910 @default.
- W4313886467 hasConcept C43503373 @default.
- W4313886467 hasConcept C49063409 @default.
- W4313886467 hasConcept C62520636 @default.
- W4313886467 hasConcept C68687820 @default.
- W4313886467 hasConcept C74064498 @default.
- W4313886467 hasConcept C78336883 @default.
- W4313886467 hasConcept C82706917 @default.
- W4313886467 hasConcept C95974651 @default.
- W4313886467 hasConceptScore W4313886467C119599485 @default.
- W4313886467 hasConceptScore W4313886467C121332964 @default.
- W4313886467 hasConceptScore W4313886467C125485243 @default.
- W4313886467 hasConceptScore W4313886467C127413603 @default.
- W4313886467 hasConceptScore W4313886467C147120987 @default.
- W4313886467 hasConceptScore W4313886467C17525397 @default.
- W4313886467 hasConceptScore W4313886467C184779094 @default.
- W4313886467 hasConceptScore W4313886467C192039680 @default.
- W4313886467 hasConceptScore W4313886467C192562407 @default.
- W4313886467 hasConceptScore W4313886467C24890656 @default.
- W4313886467 hasConceptScore W4313886467C2778865910 @default.
- W4313886467 hasConceptScore W4313886467C43503373 @default.
- W4313886467 hasConceptScore W4313886467C49063409 @default.
- W4313886467 hasConceptScore W4313886467C62520636 @default.
- W4313886467 hasConceptScore W4313886467C68687820 @default.
- W4313886467 hasConceptScore W4313886467C74064498 @default.
- W4313886467 hasConceptScore W4313886467C78336883 @default.
- W4313886467 hasConceptScore W4313886467C82706917 @default.
- W4313886467 hasConceptScore W4313886467C95974651 @default.
- W4313886467 hasLocation W43138864671 @default.
- W4313886467 hasOpenAccess W4313886467 @default.
- W4313886467 hasPrimaryLocation W43138864671 @default.
- W4313886467 hasRelatedWork W1601588525 @default.
- W4313886467 hasRelatedWork W1619276345 @default.
- W4313886467 hasRelatedWork W2027273670 @default.
- W4313886467 hasRelatedWork W2069397480 @default.
- W4313886467 hasRelatedWork W2094019959 @default.
- W4313886467 hasRelatedWork W2790125938 @default.
- W4313886467 hasRelatedWork W3161428273 @default.
- W4313886467 hasRelatedWork W3162271292 @default.
- W4313886467 hasRelatedWork W4313886467 @default.
- W4313886467 hasRelatedWork W2133432655 @default.
- W4313886467 isParatext "false" @default.
- W4313886467 isRetracted "false" @default.
- W4313886467 workType "article" @default.