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- W4313906571 abstract "We report an ohmic contact metallization scheme for n-GaN based on a Re–Al–Ni–Au multilayer stack that offers low-resistivity and provides better edge sharpness and lower surface roughness at reduced annealing temperature compared to standard Ti–Al-based metallization. We studied three sets of samples with Re thicknesses of 10, 30, and 60 nm and measured specific contact resistances using the circular transmission line method. We obtained reliable ohmic contacts with specific contact resistance of the order of 10−6 Ω cm2 at 550 °C temperature with the contact stack having a large annealing temperature window of >300 °C for resistivity below 5 × 10−6 Ω cm2. The lowest contact resistivity, below 10−7 Ω cm2, is achieved at annealing temperature around 650–700 °C. A reduction in surface roughness by a factor of 4, with excellent edge definition for Re >30 nm thickness is observed as compared to Ti–Al contacts. Grazing incidence x-ray diffraction and electron dispersive x-ray spectroscopy (EDS) show intermetallic phases of RexNy, Re–Al–Ni, Al–Re, and Al–Au being formed. Atomic force microscope and EDS measurements show the formation of crystalline Re–Al–Ni agglomerates, surrounded by phases of AlAu2 and Al2Au5. The presence of Re seems to suppress the formation of viscous AlAu4 phase, thus minimizing the lateral flow of the metals and providing better edge acuity. The temperature dependence of contact resistivity suggests a field-emission mechanism for current transport across the contact. Our results show that Re-based ohmic contacts, with their lower annealing temperature and excellent edge definition, may offer a promising alternative to Ti–Al contacts." @default.
- W4313906571 created "2023-01-10" @default.
- W4313906571 creator A5027057638 @default.
- W4313906571 creator A5027088482 @default.
- W4313906571 creator A5053829230 @default.
- W4313906571 creator A5066568136 @default.
- W4313906571 date "2022-08-16" @default.
- W4313906571 modified "2023-09-27" @default.
- W4313906571 title "Rhenium-based low resistivity and low annealing temperature ohmic contacts to n-GaN" @default.
- W4313906571 cites W1974835566 @default.
- W4313906571 cites W1991077970 @default.
- W4313906571 cites W2004757370 @default.
- W4313906571 cites W2008575875 @default.
- W4313906571 cites W2015915100 @default.
- W4313906571 cites W2020627146 @default.
- W4313906571 cites W2027633497 @default.
- W4313906571 cites W2036426035 @default.
- W4313906571 cites W2045053755 @default.
- W4313906571 cites W2045116035 @default.
- W4313906571 cites W2073162017 @default.
- W4313906571 cites W2077332919 @default.
- W4313906571 cites W2079453476 @default.
- W4313906571 cites W2085444235 @default.
- W4313906571 cites W2091434357 @default.
- W4313906571 cites W2095354758 @default.
- W4313906571 cites W2096551349 @default.
- W4313906571 cites W2102105678 @default.
- W4313906571 cites W2139446809 @default.
- W4313906571 cites W2141632766 @default.
- W4313906571 cites W2155080109 @default.
- W4313906571 cites W2340378496 @default.
- W4313906571 cites W2923799363 @default.
- W4313906571 cites W4251361952 @default.
- W4313906571 cites W618337480 @default.
- W4313906571 doi "https://doi.org/10.1063/5.0082396" @default.
- W4313906571 hasPublicationYear "2022" @default.
- W4313906571 type Work @default.
- W4313906571 citedByCount "0" @default.
- W4313906571 crossrefType "journal-article" @default.
- W4313906571 hasAuthorship W4313906571A5027057638 @default.
- W4313906571 hasAuthorship W4313906571A5027088482 @default.
- W4313906571 hasAuthorship W4313906571A5053829230 @default.
- W4313906571 hasAuthorship W4313906571A5066568136 @default.
- W4313906571 hasConcept C113196181 @default.
- W4313906571 hasConcept C119599485 @default.
- W4313906571 hasConcept C123671423 @default.
- W4313906571 hasConcept C127413603 @default.
- W4313906571 hasConcept C138230450 @default.
- W4313906571 hasConcept C159985019 @default.
- W4313906571 hasConcept C185592680 @default.
- W4313906571 hasConcept C191897082 @default.
- W4313906571 hasConcept C192562407 @default.
- W4313906571 hasConcept C27501479 @default.
- W4313906571 hasConcept C2777855556 @default.
- W4313906571 hasConcept C2779227376 @default.
- W4313906571 hasConcept C2780026712 @default.
- W4313906571 hasConcept C43617362 @default.
- W4313906571 hasConcept C69990965 @default.
- W4313906571 hasConceptScore W4313906571C113196181 @default.
- W4313906571 hasConceptScore W4313906571C119599485 @default.
- W4313906571 hasConceptScore W4313906571C123671423 @default.
- W4313906571 hasConceptScore W4313906571C127413603 @default.
- W4313906571 hasConceptScore W4313906571C138230450 @default.
- W4313906571 hasConceptScore W4313906571C159985019 @default.
- W4313906571 hasConceptScore W4313906571C185592680 @default.
- W4313906571 hasConceptScore W4313906571C191897082 @default.
- W4313906571 hasConceptScore W4313906571C192562407 @default.
- W4313906571 hasConceptScore W4313906571C27501479 @default.
- W4313906571 hasConceptScore W4313906571C2777855556 @default.
- W4313906571 hasConceptScore W4313906571C2779227376 @default.
- W4313906571 hasConceptScore W4313906571C2780026712 @default.
- W4313906571 hasConceptScore W4313906571C43617362 @default.
- W4313906571 hasConceptScore W4313906571C69990965 @default.
- W4313906571 hasFunder F4320320768 @default.
- W4313906571 hasIssue "7" @default.
- W4313906571 hasLocation W43139065711 @default.
- W4313906571 hasOpenAccess W4313906571 @default.
- W4313906571 hasPrimaryLocation W43139065711 @default.
- W4313906571 hasRelatedWork W1975027344 @default.
- W4313906571 hasRelatedWork W2007848614 @default.
- W4313906571 hasRelatedWork W2010729172 @default.
- W4313906571 hasRelatedWork W2033504124 @default.
- W4313906571 hasRelatedWork W2050260823 @default.
- W4313906571 hasRelatedWork W2083905050 @default.
- W4313906571 hasRelatedWork W2126473095 @default.
- W4313906571 hasRelatedWork W2384550850 @default.
- W4313906571 hasRelatedWork W2752947955 @default.
- W4313906571 hasRelatedWork W4213029923 @default.
- W4313906571 hasVolume "132" @default.
- W4313906571 isParatext "false" @default.
- W4313906571 isRetracted "false" @default.
- W4313906571 workType "article" @default.