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- W4316661119 endingPage "8" @default.
- W4316661119 startingPage "1" @default.
- W4316661119 abstract "The <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${alpha }$ </tex-math></inline-formula> -Al2O3 sensor has low sensitivity, and its capacitance value only slightly changes in low-humidity environment. To improve the characteristics of such sensors in the field of low humidity, a sensor with a double-sided structure was designed for measuring ppm levels. In this article, the principle of increasing the total effective surface area of the sensing film is investigated based on a conventional sensor. The sensor consists of a parallel-plate capacitive structure with a porous <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${alpha }$ </tex-math></inline-formula> -Al2O3-nanostructured sensing film fabricated on an aluminum substrate using an anodic oxidation method. First, the background and objectives of the work are presented. Next, the mathematical model of the sensor with a double-sided structure and its equivalent circuit is briefly described. A simulation in COMSOL is also presented. Then, the process of manufacturing the moisture-sensitive film and sensor is briefly explained. Finally, the performance of the double-sided <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${alpha }$ </tex-math></inline-formula> -al2O3 low-humidity sensor is tested and compared. The results show that the output response of the sensor increases by 2–3 times, and the sensitivity increases by nearly two times to 1.68%/ppm in the range of 1–1000 ppm. The sensor’s temperature dependence, response time, and measurement range are improved." @default.
- W4316661119 created "2023-01-17" @default.
- W4316661119 creator A5040421616 @default.
- W4316661119 creator A5061276503 @default.
- W4316661119 creator A5064040070 @default.
- W4316661119 creator A5089563681 @default.
- W4316661119 date "2023-01-01" @default.
- W4316661119 modified "2023-09-30" @default.
- W4316661119 title "A Novel Capacitive Low-Humidity Sensor Based on a Double-Sided Structure" @default.
- W4316661119 cites W1983306028 @default.
- W4316661119 cites W1994884747 @default.
- W4316661119 cites W2001086979 @default.
- W4316661119 cites W2004616419 @default.
- W4316661119 cites W2013247108 @default.
- W4316661119 cites W2021682139 @default.
- W4316661119 cites W2022643834 @default.
- W4316661119 cites W2027788633 @default.
- W4316661119 cites W2032299735 @default.
- W4316661119 cites W2047947181 @default.
- W4316661119 cites W2069809145 @default.
- W4316661119 cites W2076374936 @default.
- W4316661119 cites W2083340158 @default.
- W4316661119 cites W2111502295 @default.
- W4316661119 cites W2119499934 @default.
- W4316661119 cites W2135717168 @default.
- W4316661119 cites W2165219985 @default.
- W4316661119 cites W2473240341 @default.
- W4316661119 cites W2614457808 @default.
- W4316661119 cites W2792724195 @default.
- W4316661119 cites W2970350509 @default.
- W4316661119 cites W2972414465 @default.
- W4316661119 cites W2983981144 @default.
- W4316661119 cites W3135883406 @default.
- W4316661119 cites W3155894836 @default.
- W4316661119 cites W3156821208 @default.
- W4316661119 doi "https://doi.org/10.1109/tim.2023.3237227" @default.
- W4316661119 hasPublicationYear "2023" @default.
- W4316661119 type Work @default.
- W4316661119 citedByCount "0" @default.
- W4316661119 crossrefType "journal-article" @default.
- W4316661119 hasAuthorship W4316661119A5040421616 @default.
- W4316661119 hasAuthorship W4316661119A5061276503 @default.
- W4316661119 hasAuthorship W4316661119A5064040070 @default.
- W4316661119 hasAuthorship W4316661119A5089563681 @default.
- W4316661119 hasConcept C111368507 @default.
- W4316661119 hasConcept C11413529 @default.
- W4316661119 hasConcept C119599485 @default.
- W4316661119 hasConcept C121332964 @default.
- W4316661119 hasConcept C127313418 @default.
- W4316661119 hasConcept C127413603 @default.
- W4316661119 hasConcept C151420433 @default.
- W4316661119 hasConcept C17525397 @default.
- W4316661119 hasConcept C192562407 @default.
- W4316661119 hasConcept C206755178 @default.
- W4316661119 hasConcept C2777289219 @default.
- W4316661119 hasConcept C30066665 @default.
- W4316661119 hasConcept C33923547 @default.
- W4316661119 hasConcept C45357846 @default.
- W4316661119 hasConcept C62520636 @default.
- W4316661119 hasConcept C94375191 @default.
- W4316661119 hasConcept C97355855 @default.
- W4316661119 hasConceptScore W4316661119C111368507 @default.
- W4316661119 hasConceptScore W4316661119C11413529 @default.
- W4316661119 hasConceptScore W4316661119C119599485 @default.
- W4316661119 hasConceptScore W4316661119C121332964 @default.
- W4316661119 hasConceptScore W4316661119C127313418 @default.
- W4316661119 hasConceptScore W4316661119C127413603 @default.
- W4316661119 hasConceptScore W4316661119C151420433 @default.
- W4316661119 hasConceptScore W4316661119C17525397 @default.
- W4316661119 hasConceptScore W4316661119C192562407 @default.
- W4316661119 hasConceptScore W4316661119C206755178 @default.
- W4316661119 hasConceptScore W4316661119C2777289219 @default.
- W4316661119 hasConceptScore W4316661119C30066665 @default.
- W4316661119 hasConceptScore W4316661119C33923547 @default.
- W4316661119 hasConceptScore W4316661119C45357846 @default.
- W4316661119 hasConceptScore W4316661119C62520636 @default.
- W4316661119 hasConceptScore W4316661119C94375191 @default.
- W4316661119 hasConceptScore W4316661119C97355855 @default.
- W4316661119 hasLocation W43166611191 @default.
- W4316661119 hasOpenAccess W4316661119 @default.
- W4316661119 hasPrimaryLocation W43166611191 @default.
- W4316661119 hasRelatedWork W1503394514 @default.
- W4316661119 hasRelatedWork W2033081078 @default.
- W4316661119 hasRelatedWork W2069809145 @default.
- W4316661119 hasRelatedWork W2134746914 @default.
- W4316661119 hasRelatedWork W2269145440 @default.
- W4316661119 hasRelatedWork W2966791158 @default.
- W4316661119 hasRelatedWork W2990105670 @default.
- W4316661119 hasRelatedWork W2999404065 @default.
- W4316661119 hasRelatedWork W3134230845 @default.
- W4316661119 hasRelatedWork W4292373602 @default.
- W4316661119 hasVolume "72" @default.
- W4316661119 isParatext "false" @default.
- W4316661119 isRetracted "false" @default.
- W4316661119 workType "article" @default.