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- W43168892 abstract "A microlithographic technique has been developed to fabricate optical waveguides of organic crystal. This new process uses a water-soluble inorganic photoresist and oxygen-reactive-ion-beam-etching technique. By using this technique, we have succeeded in fabrication of strip waveguides made of some nonlinear optical organic crystals. Since this process is organic-solvent-free and does not require high-temperature baking, it is applicable to almost any organic crystal." @default.
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- W43168892 date "1994-01-01" @default.
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- W43168892 title "Microfabrication of nonlinear optical organic crystals using an inorganic photoresist" @default.
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- W43168892 doi "https://doi.org/10.1016/b978-1-4832-8380-7.50097-3" @default.
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