FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4317381682> ?p ?o ?g. }

• W4317381682 abstract "Hybrid bonding has become a promising solution to next generation of high-performance 3D integration packaging technology with an advanced development of material process conditions and design. A fabrication process in hybrid bonding relies on wafer stacking by direct bonding of dielectric/dielectric surfaces and the simultaneous interconnection of Cu/Cu bumps at a relatively low thermal budget. However, due to the process compatibility between the Cu bumps and the dielectric, it is very challenging to obtained desired shape and recess of Cu bump and surrounding dielectric with chemical mechanical planarization (CMP) process. We used an atomistic modelling platform to address this challenge focusing on different material properties such as surface activation in dielectrics and thermal expansion (CTE) coefficient on Cu." @default.
• W4317381682 created "2023-01-19" @default.
• W4317381682 creator A5001846498 @default.
• W4317381682 creator A5014491703 @default.
• W4317381682 creator A5026956240 @default.
• W4317381682 creator A5036160470 @default.
• W4317381682 creator A5039989567 @default.
• W4317381682 creator A5046732300 @default.
• W4317381682 creator A5061303066 @default.
• W4317381682 creator A5081644150 @default.
• W4317381682 creator A5089589706 @default.
• W4317381682 date "2022-12-07" @default.
• W4317381682 modified "2023-09-26" @default.
• W4317381682 title "Material Innovation Through Atomistic Modelling for Hybrid Bonding Technology" @default.
• W4317381682 cites W2044591029 @default.
• W4317381682 cites W2137893918 @default.
• W4317381682 cites W2320552075 @default.
• W4317381682 cites W2733202436 @default.
• W4317381682 cites W2886973230 @default.
• W4317381682 cites W2944119246 @default.
• W4317381682 cites W3102383486 @default.
• W4317381682 cites W4231483166 @default.
• W4317381682 cites W4285103184 @default.
• W4317381682 doi "https://doi.org/10.1109/eptc56328.2022.10013200" @default.
• W4317381682 hasPublicationYear "2022" @default.
• W4317381682 type Work @default.
• W4317381682 citedByCount "1" @default.
• W4317381682 countsByYear W43173816822023 @default.
• W4317381682 crossrefType "proceedings-article" @default.
• W4317381682 hasAuthorship W4317381682A5001846498 @default.
• W4317381682 hasAuthorship W4317381682A5014491703 @default.
• W4317381682 hasAuthorship W4317381682A5026956240 @default.
• W4317381682 hasAuthorship W4317381682A5036160470 @default.
• W4317381682 hasAuthorship W4317381682A5039989567 @default.
• W4317381682 hasAuthorship W4317381682A5046732300 @default.
• W4317381682 hasAuthorship W4317381682A5061303066 @default.
• W4317381682 hasAuthorship W4317381682A5081644150 @default.
• W4317381682 hasAuthorship W4317381682A5089589706 @default.
• W4317381682 hasConcept C121332964 @default.
• W4317381682 hasConcept C123745756 @default.
• W4317381682 hasConcept C127413603 @default.
• W4317381682 hasConcept C133386390 @default.
• W4317381682 hasConcept C136525101 @default.
• W4317381682 hasConcept C138113353 @default.
• W4317381682 hasConcept C142724271 @default.
• W4317381682 hasConcept C153294291 @default.
• W4317381682 hasConcept C159985019 @default.
• W4317381682 hasConcept C160671074 @default.
• W4317381682 hasConcept C180088628 @default.
• W4317381682 hasConcept C192562407 @default.
• W4317381682 hasConcept C204530211 @default.
• W4317381682 hasConcept C204787440 @default.
• W4317381682 hasConcept C24326235 @default.
• W4317381682 hasConcept C2778071519 @default.
• W4317381682 hasConcept C2778648169 @default.
• W4317381682 hasConcept C2779133538 @default.
• W4317381682 hasConcept C2779866884 @default.
• W4317381682 hasConcept C31258907 @default.
• W4317381682 hasConcept C33347731 @default.
• W4317381682 hasConcept C41008148 @default.
• W4317381682 hasConcept C46141821 @default.
• W4317381682 hasConcept C47463417 @default.
• W4317381682 hasConcept C49040817 @default.
• W4317381682 hasConcept C530198007 @default.
• W4317381682 hasConcept C544956773 @default.
• W4317381682 hasConcept C59088047 @default.
• W4317381682 hasConcept C61696701 @default.
• W4317381682 hasConcept C71924100 @default.
• W4317381682 hasConceptScore W4317381682C121332964 @default.
• W4317381682 hasConceptScore W4317381682C123745756 @default.
• W4317381682 hasConceptScore W4317381682C127413603 @default.
• W4317381682 hasConceptScore W4317381682C133386390 @default.
• W4317381682 hasConceptScore W4317381682C136525101 @default.
• W4317381682 hasConceptScore W4317381682C138113353 @default.
• W4317381682 hasConceptScore W4317381682C142724271 @default.
• W4317381682 hasConceptScore W4317381682C153294291 @default.
• W4317381682 hasConceptScore W4317381682C159985019 @default.
• W4317381682 hasConceptScore W4317381682C160671074 @default.
• W4317381682 hasConceptScore W4317381682C180088628 @default.
• W4317381682 hasConceptScore W4317381682C192562407 @default.
• W4317381682 hasConceptScore W4317381682C204530211 @default.
• W4317381682 hasConceptScore W4317381682C204787440 @default.
• W4317381682 hasConceptScore W4317381682C24326235 @default.
• W4317381682 hasConceptScore W4317381682C2778071519 @default.
• W4317381682 hasConceptScore W4317381682C2778648169 @default.
• W4317381682 hasConceptScore W4317381682C2779133538 @default.
• W4317381682 hasConceptScore W4317381682C2779866884 @default.
• W4317381682 hasConceptScore W4317381682C31258907 @default.
• W4317381682 hasConceptScore W4317381682C33347731 @default.
• W4317381682 hasConceptScore W4317381682C41008148 @default.
• W4317381682 hasConceptScore W4317381682C46141821 @default.
• W4317381682 hasConceptScore W4317381682C47463417 @default.
• W4317381682 hasConceptScore W4317381682C49040817 @default.
• W4317381682 hasConceptScore W4317381682C530198007 @default.
• W4317381682 hasConceptScore W4317381682C544956773 @default.
• W4317381682 hasConceptScore W4317381682C59088047 @default.
• W4317381682 hasConceptScore W4317381682C61696701 @default.
• W4317381682 hasConceptScore W4317381682C71924100 @default.
• W4317381682 hasLocation W43173816821 @default.
• W4317381682 hasOpenAccess W4317381682 @default.

• next