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- W4317381887 abstract "Encapsulation (TFE) [1], [2] of a radio-frequency microelectromechanical systems (RF MEMS) device with rerouting of contacts and pads for flip-chip compatibility to a much smaller CMOS chip. This article explains why peeling of RDL layers takes place and how it can be resolved by optimizing annealing process of polyimide layers. This work demonstrates wafer-level thin film" @default.
- W4317381887 created "2023-01-19" @default.
- W4317381887 creator A5009428572 @default.
- W4317381887 creator A5023031347 @default.
- W4317381887 creator A5053023302 @default.
- W4317381887 date "2022-12-07" @default.
- W4317381887 modified "2023-10-18" @default.
- W4317381887 title "Optimization of annealing process to realize RDL layers on high topography wafer for heterogeneous integration" @default.
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- W4317381887 doi "https://doi.org/10.1109/eptc56328.2022.10013238" @default.
- W4317381887 hasPublicationYear "2022" @default.
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