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- W4317381897 abstract "The paper describes the integration of novel developed acoustic MEMS sensors, in an ultra-thin and flexible substrate for use in aerospace applications, such as wind tunnel test (WTT) and flight test (FT). The technology allows the fabrication of a large area array with flush mounted microphone sensors without any topography interfering with the flow. The final array contains more than 80 piezoresistive and piezoelectric MEMS sensors, at a dimension of 300×400 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . The thickness of the bare die array is 600 µm, the array with the packaged sensors below 1550 µm." @default.
- W4317381897 created "2023-01-19" @default.
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- W4317381897 date "2022-12-07" @default.
- W4317381897 modified "2023-10-13" @default.
- W4317381897 title "Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate" @default.
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- W4317381897 doi "https://doi.org/10.1109/eptc56328.2022.10013281" @default.
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