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- W4317603973 abstract "Abstract High uniformity of the thickness and net donor concentrations ( N d - N a ) in 100 mm diameter β -Ga 2 O 3 (001) epitaxial wafer prepared by halide vapor phase epitaxy was demonstrated. An epitaxial wafer grown on a substrate with a miscut angle near 0° generated a specific epitaxial region with a lower growth rate and a higher N d - N a than the rest of the region, which deteriorated the wafer uniformity. In contrast, epitaxial wafers prepared on substrates with a miscut angle of –0.1° suppressed the occurrence of the specific epitaxial region, and an average thickness after chemical mechanical polishing of 10.6 μ m with 5% tolerance and an average N d - N a without intentionally doping of 1.1 × 10 16 cm −3 within 7% tolerance were successfully obtained." @default.
- W4317603973 created "2023-01-21" @default.
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- W4317603973 date "2023-02-10" @default.
- W4317603973 modified "2023-10-18" @default.
- W4317603973 title "Uniformity improvement of thickness and net donor concentration in halide vapor phase epitaxial β-Ga<sub>2</sub>O<sub>3</sub> wafers prepared on miscut angle substrates" @default.
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- W4317603973 doi "https://doi.org/10.35848/1347-4065/acb4fb" @default.
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