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- W4318212812 abstract "A two-dimensional, time-dependent, numerical model of plasma discharges, INDUCT95, was developed based upon a fluid treatment of ions and electrons. For inductively coupled sources, electron heating from external radio frequency coils is calculated self-consistently by solving for the time-averaged power deposited within the plasma. Time dependent biasing of structures can be applied to treat capacitively coupled radio frequency discharges. Complex chemical volume and surface reactions can be treated for neutral gas mixtures. INDUCT95 solves for densities, temperatures, fluxes, and electro-static potential in a plasma discharge. Cylindrically symmetric (r,z) or Cartesian (x,y) coordinates can be used. Both metal and dielectric internal boundaries can be treated for complex structures. Ab initio calculations of cross sections for critical electron molecule collision processes involving etchant gases were completed and published. The theoretical work was accompanied by thorough investigations of processing plasmas and workpiece surface conditions during etching and deposition of semiconductor materials, using capacitively and inductively coupled RF, electron cyclotron resonance, helicon and helical resonator reactors. Comparison of theory and experiment demonstrates the role of the plasma conditions in controlling both the geometric and chemical evolution of the semiconductor wafer surface." @default.
- W4318212812 created "2023-01-27" @default.
- W4318212812 creator A5069234308 @default.
- W4318212812 date "1997-01-16" @default.
- W4318212812 modified "2023-09-29" @default.
- W4318212812 title "Computer-aided Design of Plasma Processing Reactors Final Report CRADA No. TC-0339-92" @default.
- W4318212812 doi "https://doi.org/10.2172/756971" @default.
- W4318212812 hasPublicationYear "1997" @default.
- W4318212812 type Work @default.
- W4318212812 citedByCount "0" @default.
- W4318212812 crossrefType "report" @default.
- W4318212812 hasAuthorship W4318212812A5069234308 @default.
- W4318212812 hasBestOaLocation W43182128122 @default.
- W4318212812 hasConcept C100460472 @default.
- W4318212812 hasConcept C107187091 @default.
- W4318212812 hasConcept C108225325 @default.
- W4318212812 hasConcept C113196181 @default.
- W4318212812 hasConcept C121332964 @default.
- W4318212812 hasConcept C145148216 @default.
- W4318212812 hasConcept C145738678 @default.
- W4318212812 hasConcept C147120987 @default.
- W4318212812 hasConcept C160671074 @default.
- W4318212812 hasConcept C175361016 @default.
- W4318212812 hasConcept C178790620 @default.
- W4318212812 hasConcept C184779094 @default.
- W4318212812 hasConcept C185592680 @default.
- W4318212812 hasConcept C192562407 @default.
- W4318212812 hasConcept C2779123320 @default.
- W4318212812 hasConcept C2779227376 @default.
- W4318212812 hasConcept C43617362 @default.
- W4318212812 hasConcept C49040817 @default.
- W4318212812 hasConcept C62520636 @default.
- W4318212812 hasConcept C68687820 @default.
- W4318212812 hasConcept C82706917 @default.
- W4318212812 hasConcept C95974651 @default.
- W4318212812 hasConceptScore W4318212812C100460472 @default.
- W4318212812 hasConceptScore W4318212812C107187091 @default.
- W4318212812 hasConceptScore W4318212812C108225325 @default.
- W4318212812 hasConceptScore W4318212812C113196181 @default.
- W4318212812 hasConceptScore W4318212812C121332964 @default.
- W4318212812 hasConceptScore W4318212812C145148216 @default.
- W4318212812 hasConceptScore W4318212812C145738678 @default.
- W4318212812 hasConceptScore W4318212812C147120987 @default.
- W4318212812 hasConceptScore W4318212812C160671074 @default.
- W4318212812 hasConceptScore W4318212812C175361016 @default.
- W4318212812 hasConceptScore W4318212812C178790620 @default.
- W4318212812 hasConceptScore W4318212812C184779094 @default.
- W4318212812 hasConceptScore W4318212812C185592680 @default.
- W4318212812 hasConceptScore W4318212812C192562407 @default.
- W4318212812 hasConceptScore W4318212812C2779123320 @default.
- W4318212812 hasConceptScore W4318212812C2779227376 @default.
- W4318212812 hasConceptScore W4318212812C43617362 @default.
- W4318212812 hasConceptScore W4318212812C49040817 @default.
- W4318212812 hasConceptScore W4318212812C62520636 @default.
- W4318212812 hasConceptScore W4318212812C68687820 @default.
- W4318212812 hasConceptScore W4318212812C82706917 @default.
- W4318212812 hasConceptScore W4318212812C95974651 @default.
- W4318212812 hasLocation W43182128121 @default.
- W4318212812 hasLocation W43182128122 @default.
- W4318212812 hasLocation W43182128123 @default.
- W4318212812 hasOpenAccess W4318212812 @default.
- W4318212812 hasPrimaryLocation W43182128121 @default.
- W4318212812 hasRelatedWork W1544774047 @default.
- W4318212812 hasRelatedWork W1975345138 @default.
- W4318212812 hasRelatedWork W1988902861 @default.
- W4318212812 hasRelatedWork W2059112004 @default.
- W4318212812 hasRelatedWork W2065108417 @default.
- W4318212812 hasRelatedWork W2167011693 @default.
- W4318212812 hasRelatedWork W2373992613 @default.
- W4318212812 hasRelatedWork W3197419717 @default.
- W4318212812 hasRelatedWork W65767922 @default.
- W4318212812 hasRelatedWork W2044417772 @default.
- W4318212812 isParatext "false" @default.
- W4318212812 isRetracted "false" @default.
- W4318212812 workType "report" @default.