Matches in SemOpenAlex for { <https://semopenalex.org/work/W4318601911> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W4318601911 abstract "The gate-all-around nanosheet field effect transistor (GAA-NSFET) is an alternative for sub-7nm CMOS technology nodes. Its 3D stacked structure offers a good solution to short-channel-effects and leads to high integration density, and results in high power consumption per unit volume and more serve self-heating effect in GAA-NSFET. The more temperature rise caused by the severe self-heating effect introduces strong thermal-mechanical coupling effect and affects the performance and reliability of transistors. In this paper, we use the finite element method to simulate the thermal-mechanical coupling processes in GAA-NSFET. The heat conduction equation is solved numerically to get the temperature distribution. The kinetic equation is then solved to get the displacement distribution and thermal stress. The simulation results show that the hot spot of the transistor is in the channel, and the greatest thermal stress occurs in the channel region as well." @default.
- W4318601911 created "2023-01-31" @default.
- W4318601911 creator A5000544985 @default.
- W4318601911 creator A5000648786 @default.
- W4318601911 creator A5025477117 @default.
- W4318601911 date "2022-08-12" @default.
- W4318601911 modified "2023-10-16" @default.
- W4318601911 title "Computational Study of Thermal Stress in Gate-All-Around Nanosheet Field Effect Transistor" @default.
- W4318601911 cites W2026520195 @default.
- W4318601911 cites W2102249328 @default.
- W4318601911 cites W2126570492 @default.
- W4318601911 cites W2786636341 @default.
- W4318601911 cites W2886262657 @default.
- W4318601911 cites W2913404074 @default.
- W4318601911 doi "https://doi.org/10.1109/icmmt55580.2022.10023319" @default.
- W4318601911 hasPublicationYear "2022" @default.
- W4318601911 type Work @default.
- W4318601911 citedByCount "0" @default.
- W4318601911 crossrefType "proceedings-article" @default.
- W4318601911 hasAuthorship W4318601911A5000544985 @default.
- W4318601911 hasAuthorship W4318601911A5000648786 @default.
- W4318601911 hasAuthorship W4318601911A5025477117 @default.
- W4318601911 hasConcept C119599485 @default.
- W4318601911 hasConcept C121332964 @default.
- W4318601911 hasConcept C127413603 @default.
- W4318601911 hasConcept C131584629 @default.
- W4318601911 hasConcept C135628077 @default.
- W4318601911 hasConcept C138885662 @default.
- W4318601911 hasConcept C145598152 @default.
- W4318601911 hasConcept C159985019 @default.
- W4318601911 hasConcept C165801399 @default.
- W4318601911 hasConcept C171250308 @default.
- W4318601911 hasConcept C172100665 @default.
- W4318601911 hasConcept C172385210 @default.
- W4318601911 hasConcept C192562407 @default.
- W4318601911 hasConcept C204530211 @default.
- W4318601911 hasConcept C21036866 @default.
- W4318601911 hasConcept C24326235 @default.
- W4318601911 hasConcept C41895202 @default.
- W4318601911 hasConcept C51967427 @default.
- W4318601911 hasConcept C57879066 @default.
- W4318601911 hasConcept C66938386 @default.
- W4318601911 hasConcept C97346530 @default.
- W4318601911 hasConcept C97355855 @default.
- W4318601911 hasConceptScore W4318601911C119599485 @default.
- W4318601911 hasConceptScore W4318601911C121332964 @default.
- W4318601911 hasConceptScore W4318601911C127413603 @default.
- W4318601911 hasConceptScore W4318601911C131584629 @default.
- W4318601911 hasConceptScore W4318601911C135628077 @default.
- W4318601911 hasConceptScore W4318601911C138885662 @default.
- W4318601911 hasConceptScore W4318601911C145598152 @default.
- W4318601911 hasConceptScore W4318601911C159985019 @default.
- W4318601911 hasConceptScore W4318601911C165801399 @default.
- W4318601911 hasConceptScore W4318601911C171250308 @default.
- W4318601911 hasConceptScore W4318601911C172100665 @default.
- W4318601911 hasConceptScore W4318601911C172385210 @default.
- W4318601911 hasConceptScore W4318601911C192562407 @default.
- W4318601911 hasConceptScore W4318601911C204530211 @default.
- W4318601911 hasConceptScore W4318601911C21036866 @default.
- W4318601911 hasConceptScore W4318601911C24326235 @default.
- W4318601911 hasConceptScore W4318601911C41895202 @default.
- W4318601911 hasConceptScore W4318601911C51967427 @default.
- W4318601911 hasConceptScore W4318601911C57879066 @default.
- W4318601911 hasConceptScore W4318601911C66938386 @default.
- W4318601911 hasConceptScore W4318601911C97346530 @default.
- W4318601911 hasConceptScore W4318601911C97355855 @default.
- W4318601911 hasFunder F4320321001 @default.
- W4318601911 hasFunder F4320338464 @default.
- W4318601911 hasLocation W43186019111 @default.
- W4318601911 hasOpenAccess W4318601911 @default.
- W4318601911 hasPrimaryLocation W43186019111 @default.
- W4318601911 hasRelatedWork W1991468104 @default.
- W4318601911 hasRelatedWork W2006079523 @default.
- W4318601911 hasRelatedWork W2006399102 @default.
- W4318601911 hasRelatedWork W2061329490 @default.
- W4318601911 hasRelatedWork W2241911392 @default.
- W4318601911 hasRelatedWork W2469499066 @default.
- W4318601911 hasRelatedWork W2602952148 @default.
- W4318601911 hasRelatedWork W2907101054 @default.
- W4318601911 hasRelatedWork W2950198358 @default.
- W4318601911 hasRelatedWork W3105899259 @default.
- W4318601911 isParatext "false" @default.
- W4318601911 isRetracted "false" @default.
- W4318601911 workType "article" @default.