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• W4319310723 endingPage "2956" @default.
• W4319310723 startingPage "2951" @default.
• W4319310723 abstract "Abstract Characterization of defects in semiconductor wafers is essential for the development and improvement of semiconductor devices, especially power devices. X-ray topography (XRT) using synchrotron radiation is a powerful methods used for defect characterization. To achieve detailed characterization of large-size semiconductor wafers by synchrotron XRT, we have developed nuclear emulsion plates reaching a high-resolution and wide dynamic range. We have shown that higher-resolution XRT images could be obtained using emulsions with smaller iodobromide crystals, and demonstrated clear observation of threading edge dislocations in a SiC epitaxial layer having small contrast. Furthermore, we demonstrated XRT image acquisition for almost all of a 150-mm SiC wafer with one plate. Our development will contribute to advances in electronic materials, especially in the field of power electronics, in which defect characterization is important for improving the performance and yield of devices." @default.
• W4319310723 created "2023-02-08" @default.
• W4319310723 creator A5011071712 @default.
• W4319310723 creator A5016171961 @default.
• W4319310723 creator A5044796222 @default.
• W4319310723 creator A5045123925 @default.
• W4319310723 creator A5054498473 @default.
• W4319310723 creator A5065375890 @default.
• W4319310723 creator A5075753271 @default.
• W4319310723 date "2023-02-06" @default.
• W4319310723 modified "2023-10-14" @default.
• W4319310723 title "Development of High-Resolution Nuclear Emulsion Plates for Synchrotron X-Ray Topography Observation of Large-Size Semiconductor Wafers" @default.
• W4319310723 cites W1600796735 @default.
• W4319310723 cites W1963970330 @default.
• W4319310723 cites W1966036801 @default.
• W4319310723 cites W1983668910 @default.
• W4319310723 cites W1999600827 @default.
• W4319310723 cites W2002067634 @default.
• W4319310723 cites W2009035285 @default.
• W4319310723 cites W2011890165 @default.
• W4319310723 cites W2017367316 @default.
• W4319310723 cites W2018834284 @default.
• W4319310723 cites W2018926944 @default.
• W4319310723 cites W2019796860 @default.
• W4319310723 cites W2035391577 @default.
• W4319310723 cites W2036158085 @default.
• W4319310723 cites W2037975263 @default.
• W4319310723 cites W2039230993 @default.
• W4319310723 cites W2046551621 @default.
• W4319310723 cites W2059455700 @default.
• W4319310723 cites W2076502423 @default.
• W4319310723 cites W2079037441 @default.
• W4319310723 cites W2082246719 @default.
• W4319310723 cites W2085856477 @default.
• W4319310723 cites W2085881923 @default.
• W4319310723 cites W2092874501 @default.
• W4319310723 cites W2094663383 @default.
• W4319310723 cites W2105948555 @default.
• W4319310723 cites W2107041652 @default.
• W4319310723 cites W2113540772 @default.
• W4319310723 cites W2121604213 @default.
• W4319310723 cites W2132482993 @default.
• W4319310723 cites W2154755257 @default.
• W4319310723 cites W2168414160 @default.
• W4319310723 cites W2302461183 @default.
• W4319310723 cites W2497625895 @default.
• W4319310723 cites W2530419300 @default.
• W4319310723 cites W2564437611 @default.
• W4319310723 cites W2767121551 @default.
• W4319310723 cites W2802215412 @default.
• W4319310723 cites W2897993557 @default.
• W4319310723 cites W2935846408 @default.
• W4319310723 cites W2939984306 @default.
• W4319310723 cites W2996707034 @default.
• W4319310723 cites W3008355916 @default.
• W4319310723 cites W3013873090 @default.
• W4319310723 cites W3100474486 @default.
• W4319310723 cites W3122671878 @default.
• W4319310723 cites W4288884807 @default.
• W4319310723 cites W4290830023 @default.
• W4319310723 cites W4291552278 @default.
• W4319310723 doi "https://doi.org/10.1007/s11664-023-10270-8" @default.
• W4319310723 hasPublicationYear "2023" @default.
• W4319310723 type Work @default.
• W4319310723 citedByCount "0" @default.
• W4319310723 crossrefType "journal-article" @default.
• W4319310723 hasAuthorship W4319310723A5011071712 @default.
• W4319310723 hasAuthorship W4319310723A5016171961 @default.
• W4319310723 hasAuthorship W4319310723A5044796222 @default.
• W4319310723 hasAuthorship W4319310723A5045123925 @default.
• W4319310723 hasAuthorship W4319310723A5054498473 @default.
• W4319310723 hasAuthorship W4319310723A5065375890 @default.
• W4319310723 hasAuthorship W4319310723A5075753271 @default.
• W4319310723 hasBestOaLocation W43193107231 @default.
• W4319310723 hasConcept C108225325 @default.
• W4319310723 hasConcept C110738630 @default.
• W4319310723 hasConcept C120665830 @default.
• W4319310723 hasConcept C121332964 @default.
• W4319310723 hasConcept C160671074 @default.
• W4319310723 hasConcept C16332341 @default.
• W4319310723 hasConcept C171250308 @default.
• W4319310723 hasConcept C192562407 @default.
• W4319310723 hasConcept C21368211 @default.
• W4319310723 hasConcept C2779227376 @default.
• W4319310723 hasConcept C2780841128 @default.
• W4319310723 hasConcept C49040817 @default.
• W4319310723 hasConcept C79635011 @default.
• W4319310723 hasConceptScore W4319310723C108225325 @default.
• W4319310723 hasConceptScore W4319310723C110738630 @default.
• W4319310723 hasConceptScore W4319310723C120665830 @default.
• W4319310723 hasConceptScore W4319310723C121332964 @default.
• W4319310723 hasConceptScore W4319310723C160671074 @default.
• W4319310723 hasConceptScore W4319310723C16332341 @default.
• W4319310723 hasConceptScore W4319310723C171250308 @default.
• W4319310723 hasConceptScore W4319310723C192562407 @default.
• W4319310723 hasConceptScore W4319310723C21368211 @default.
• W4319310723 hasConceptScore W4319310723C2779227376 @default.
• W4319310723 hasConceptScore W4319310723C2780841128 @default.

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