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- W4319460087 abstract "This letter presents the first demonstration of epitaxial scandium aluminum nitride (ScAlN) based high-overtone bulk acoustic resonators (epi-HBARs) with over 1600 acoustic cavity resonance modes spanning the X – Ka bands (8 GHz – 40 GHz). We present data up to the <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$2150^{text {th}}$ </tex-math></inline-formula> overtone (39.99 GHz). This is an unprecedented result even for HBARs, which often exhibit hundreds of overtones. The measurements demonstrate the successful combination of multiple innovations, namely: a) the growth of ultra-thin, high quality Sc0.33Al0.67N (high Sc fraction), b) on an epitaxial heterostructure with lattice- and acoustic impedance-matched layers, and c) the selective etching of ScAlN on NbN. Key metrics for the ScAlN epi-HBARs include <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${Q} >7000$ </tex-math></inline-formula> , <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$text{f}times text{Q},,>,,10^{{14}}$ </tex-math></inline-formula> Hz, and <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$k^{{2}}_{textit {eff}},,times text{Q}_{textit {BV}{D}} >0.22$ </tex-math></inline-formula> at cryogenic temperatures for frequencies as high as 40 GHz (>500, <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${6}times {10} ^{{12 }}$ </tex-math></inline-formula> Hz, >0.1 at room temperature). Temperature trends motivate future investigation of unquantified high frequency acoustic loss mechanisms. Such robust RF MEMS epi-HBARs with piezoelectric drive and readout are promising candidates for compact microwave/millimeter wave signal processing elements." @default.
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- W4319460087 date "2023-04-01" @default.
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- W4319460087 title "X–Ka Band Epitaxial ScAlN/AlN/NbN/SiC High-Overtone Bulk Acoustic Resonators" @default.
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- W4319460087 doi "https://doi.org/10.1109/led.2023.3243437" @default.
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