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- W4319782242 abstract "slits. B. Compact spectrometer for the wavelength range 12.4 to 25 nm (soft X-ray) based on a Sliced Multi-1ayer Grating (SMG) for ion-surface and ion trap studies. The spectrometer had resolution 200 to 500 and is UHV-compatible. C. Soft X-ray and EUV Spectrometer/Polarimeter for the wavelength range 20.0 to 40.0 nm based on a Multi-1ayer Mirror (MLM). The spectrometer has a resolution 10 to 30. D. Compact Grazing Incidence Spectrometer for the wavelength range 5.0 to 45.0 nm (EUV and SXR). This spectrometer has a resolution 500 to 800. E. Soft X-ray imaging system/Microscope for ion-surface interaction and ion trap experiments. This imaging system will also be used with the spectrometer described in B above. The completion of the project was substantially delayed due to CRADA confirmation and fund administration. The EUV imaging system has been delivered. Acspect set up a testing facility for investigation of the spectrometers to be delivered by the Moscow X-ray group from the Lebedev Physical Institute. Originally, Acspect anticipated using glass capillary converters. However, in our current modified design, these optical elements are not necessary." @default.
- W4319782242 created "2023-02-11" @default.
- W4319782242 creator A5070963800 @default.
- W4319782242 date "1996-11-27" @default.
- W4319782242 modified "2023-09-25" @default.
- W4319782242 title "Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93" @default.
- W4319782242 doi "https://doi.org/10.2172/759898" @default.
- W4319782242 hasPublicationYear "1996" @default.
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