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• W4319828869 endingPage "616" @default.
• W4319828869 startingPage "607" @default.
• W4319828869 abstract "Abstract In this paper a simplified approach for the generation of laterally p‐ and n‐doped structures applicable for cost‐effective production of interdigitated back contact (IBC) solar cells is presented. We use a stack of doping glasses deposited by atmospheric pressure chemical vapor deposition (APCVD), consisting of borosilicate glass (BSG) and phosphosilicate glass (PSG) on Czochralski‐grown (Cz) silicon substrates. A laser process creates the p‐doped regions by local liquid phase diffusion of boron from the BSG layer into the underlying molten Cz‐Si substrate. Simultaneously, the BSG‐PSG stack is removed by laser ablation. In a subsequent high‐temperature step, phosphorus diffuses from the remaining PSG‐BSG layer into the crystalline silicon substrate under inert gas atmosphere, creating complementary to laser doped areas n + ‐doped regions. By the use of APCVD, phosphorus and boron contents of the doping glasses can be adjusted freely to vary the resulting p‐ and n‐doped profiles. A higher boron content in the BSG layer enhances the diffusion of phosphorus through the BSG, especially at lower diffusion temperatures. The resulting doping profiles are characterized using electrochemical capacitance‐voltage measurements and the resulting sheet resistances using the four‐point probe method. The amount of minority dopant contamination in n‐ and p‐doped regions is investigated by secondary ion mass spectrometry. Furthermore, transfer length method (TLM)‐measurements indicate contactability of the generated doped regions." @default.
• W4319828869 created "2023-02-11" @default.
• W4319828869 creator A5025315181 @default.
• W4319828869 creator A5071976090 @default.
• W4319828869 creator A5074977563 @default.
• W4319828869 creator A5076593855 @default.
• W4319828869 date "2023-01-23" @default.
• W4319828869 modified "2023-09-25" @default.
• W4319828869 title "A simplified and masking‐free doping process for interdigitated back contact solar cells using an atmospheric pressure chemical vapor deposition borosilicate glass / phosphosilicate glass layer stack for laser doping followed by a high temperature step" @default.
• W4319828869 cites W1155250793 @default.
• W4319828869 cites W1597467680 @default.
• W4319828869 cites W1972274592 @default.
• W4319828869 cites W1972578340 @default.
• W4319828869 cites W1998163577 @default.
• W4319828869 cites W2001899268 @default.
• W4319828869 cites W2012583566 @default.
• W4319828869 cites W2018259583 @default.
• W4319828869 cites W2043360348 @default.
• W4319828869 cites W2059824139 @default.
• W4319828869 cites W2072298802 @default.
• W4319828869 cites W2124671339 @default.
• W4319828869 cites W2129260516 @default.
• W4319828869 cites W2130488690 @default.
• W4319828869 cites W2149646708 @default.
• W4319828869 cites W2266309958 @default.
• W4319828869 cites W2466432789 @default.
• W4319828869 cites W2523347477 @default.
• W4319828869 cites W2603789271 @default.
• W4319828869 cites W2759010392 @default.
• W4319828869 cites W2801142050 @default.
• W4319828869 cites W2903014356 @default.
• W4319828869 cites W2912370644 @default.
• W4319828869 cites W2971006309 @default.
• W4319828869 cites W3118900633 @default.
• W4319828869 cites W4235817125 @default.
• W4319828869 doi "https://doi.org/10.1002/pip.3663" @default.
• W4319828869 hasPublicationYear "2023" @default.
• W4319828869 type Work @default.
• W4319828869 citedByCount "0" @default.
• W4319828869 crossrefType "journal-article" @default.
• W4319828869 hasAuthorship W4319828869A5025315181 @default.
• W4319828869 hasAuthorship W4319828869A5071976090 @default.
• W4319828869 hasAuthorship W4319828869A5074977563 @default.
• W4319828869 hasAuthorship W4319828869A5076593855 @default.
• W4319828869 hasBestOaLocation W43198288691 @default.
• W4319828869 hasConcept C111368507 @default.
• W4319828869 hasConcept C113196181 @default.
• W4319828869 hasConcept C127313418 @default.
• W4319828869 hasConcept C127413603 @default.
• W4319828869 hasConcept C159985019 @default.
• W4319828869 hasConcept C178790620 @default.
• W4319828869 hasConcept C185592680 @default.
• W4319828869 hasConcept C191952053 @default.
• W4319828869 hasConcept C192562407 @default.
• W4319828869 hasConcept C206802598 @default.
• W4319828869 hasConcept C2777289219 @default.
• W4319828869 hasConcept C2779227376 @default.
• W4319828869 hasConcept C42360764 @default.
• W4319828869 hasConcept C43617362 @default.
• W4319828869 hasConcept C49040817 @default.
• W4319828869 hasConcept C501308230 @default.
• W4319828869 hasConcept C544956773 @default.
• W4319828869 hasConcept C57410435 @default.
• W4319828869 hasConcept C57863236 @default.
• W4319828869 hasConceptScore W4319828869C111368507 @default.
• W4319828869 hasConceptScore W4319828869C113196181 @default.
• W4319828869 hasConceptScore W4319828869C127313418 @default.
• W4319828869 hasConceptScore W4319828869C127413603 @default.
• W4319828869 hasConceptScore W4319828869C159985019 @default.
• W4319828869 hasConceptScore W4319828869C178790620 @default.
• W4319828869 hasConceptScore W4319828869C185592680 @default.
• W4319828869 hasConceptScore W4319828869C191952053 @default.
• W4319828869 hasConceptScore W4319828869C192562407 @default.
• W4319828869 hasConceptScore W4319828869C206802598 @default.
• W4319828869 hasConceptScore W4319828869C2777289219 @default.
• W4319828869 hasConceptScore W4319828869C2779227376 @default.
• W4319828869 hasConceptScore W4319828869C42360764 @default.
• W4319828869 hasConceptScore W4319828869C43617362 @default.
• W4319828869 hasConceptScore W4319828869C49040817 @default.
• W4319828869 hasConceptScore W4319828869C501308230 @default.
• W4319828869 hasConceptScore W4319828869C544956773 @default.
• W4319828869 hasConceptScore W4319828869C57410435 @default.
• W4319828869 hasConceptScore W4319828869C57863236 @default.
• W4319828869 hasFunder F4320336060 @default.
• W4319828869 hasIssue "6" @default.
• W4319828869 hasLocation W43198288691 @default.
• W4319828869 hasOpenAccess W4319828869 @default.
• W4319828869 hasPrimaryLocation W43198288691 @default.
• W4319828869 hasRelatedWork W1966205888 @default.
• W4319828869 hasRelatedWork W2001541608 @default.
• W4319828869 hasRelatedWork W2013862278 @default.
• W4319828869 hasRelatedWork W2033669323 @default.
• W4319828869 hasRelatedWork W2055518023 @default.
• W4319828869 hasRelatedWork W2121493818 @default.
• W4319828869 hasRelatedWork W2165653175 @default.
• W4319828869 hasRelatedWork W2319904054 @default.
• W4319828869 hasRelatedWork W2743194952 @default.
• W4319828869 hasRelatedWork W2919002619 @default.

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