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• W4320005482 abstract "This letter reports the thermal-mechanical tuning capability of an in-plane comb drive resonator using VO2 phase transition material. By inducing the insulator-to-metal transition (IMT) using a heat conduction method, a shift of approximately 2% was observed. The frequency tuning was attributed to the induced stresses during the IMT. [2022-0200]" @default.
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• W4320005482 date "2023-04-01" @default.
• W4320005482 modified "2023-09-30" @default.
• W4320005482 title "Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO₂ Phase Transition" @default.
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• W4320005482 doi "https://doi.org/10.1109/jmems.2023.3240076" @default.
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