Matches in SemOpenAlex for { <https://semopenalex.org/work/W4320021390> ?p ?o ?g. }
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- W4320021390 endingPage "393" @default.
- W4320021390 startingPage "385" @default.
- W4320021390 abstract "Comparative characterization of phosphorus diffusion from planar sources and liquid-phase diffusion by using PCl3 in technology for manufacturing silicon p-i-n photodiodes was carried out. The quantitative analysis of dislocations formed when using different variants and modes of diffusion has been performed. The influence of dislocation number on the dark current density and responsivity of photodetectors has been studied. A table has been given for estimation of surface resistance with account of colour inherent to phosphorosilicate glass after doping phosphorus into the surface layer." @default.
- W4320021390 created "2023-02-11" @default.
- W4320021390 creator A5042619369 @default.
- W4320021390 date "2022-12-22" @default.
- W4320021390 modified "2023-09-27" @default.
- W4320021390 title "Diffusion of phosphorus in technology for manufacturing silicon p-i-n photodiodes" @default.
- W4320021390 cites W1985401453 @default.
- W4320021390 cites W2051361287 @default.
- W4320021390 cites W2230554001 @default.
- W4320021390 cites W2726720632 @default.
- W4320021390 cites W2808815695 @default.
- W4320021390 cites W2911724412 @default.
- W4320021390 cites W2929226623 @default.
- W4320021390 cites W2936813095 @default.
- W4320021390 cites W3120838401 @default.
- W4320021390 cites W4214500427 @default.
- W4320021390 cites W4281882099 @default.
- W4320021390 cites W4296502144 @default.
- W4320021390 cites W4308083351 @default.
- W4320021390 doi "https://doi.org/10.15407/spqeo25.04.385" @default.
- W4320021390 hasPublicationYear "2022" @default.
- W4320021390 type Work @default.
- W4320021390 citedByCount "0" @default.
- W4320021390 crossrefType "journal-article" @default.
- W4320021390 hasAuthorship W4320021390A5042619369 @default.
- W4320021390 hasBestOaLocation W43200213901 @default.
- W4320021390 hasConcept C121332964 @default.
- W4320021390 hasConcept C121684516 @default.
- W4320021390 hasConcept C134786449 @default.
- W4320021390 hasConcept C159985019 @default.
- W4320021390 hasConcept C178889773 @default.
- W4320021390 hasConcept C180651308 @default.
- W4320021390 hasConcept C192562407 @default.
- W4320021390 hasConcept C23125352 @default.
- W4320021390 hasConcept C2779227376 @default.
- W4320021390 hasConcept C41008148 @default.
- W4320021390 hasConcept C49040817 @default.
- W4320021390 hasConcept C544956773 @default.
- W4320021390 hasConcept C57863236 @default.
- W4320021390 hasConcept C69357855 @default.
- W4320021390 hasConcept C751236 @default.
- W4320021390 hasConcept C97355855 @default.
- W4320021390 hasConceptScore W4320021390C121332964 @default.
- W4320021390 hasConceptScore W4320021390C121684516 @default.
- W4320021390 hasConceptScore W4320021390C134786449 @default.
- W4320021390 hasConceptScore W4320021390C159985019 @default.
- W4320021390 hasConceptScore W4320021390C178889773 @default.
- W4320021390 hasConceptScore W4320021390C180651308 @default.
- W4320021390 hasConceptScore W4320021390C192562407 @default.
- W4320021390 hasConceptScore W4320021390C23125352 @default.
- W4320021390 hasConceptScore W4320021390C2779227376 @default.
- W4320021390 hasConceptScore W4320021390C41008148 @default.
- W4320021390 hasConceptScore W4320021390C49040817 @default.
- W4320021390 hasConceptScore W4320021390C544956773 @default.
- W4320021390 hasConceptScore W4320021390C57863236 @default.
- W4320021390 hasConceptScore W4320021390C69357855 @default.
- W4320021390 hasConceptScore W4320021390C751236 @default.
- W4320021390 hasConceptScore W4320021390C97355855 @default.
- W4320021390 hasIssue "4" @default.
- W4320021390 hasLocation W43200213901 @default.
- W4320021390 hasOpenAccess W4320021390 @default.
- W4320021390 hasPrimaryLocation W43200213901 @default.
- W4320021390 hasRelatedWork W1575822267 @default.
- W4320021390 hasRelatedWork W1785638096 @default.
- W4320021390 hasRelatedWork W1977785731 @default.
- W4320021390 hasRelatedWork W2048597819 @default.
- W4320021390 hasRelatedWork W2097116882 @default.
- W4320021390 hasRelatedWork W2481628684 @default.
- W4320021390 hasRelatedWork W2769353489 @default.
- W4320021390 hasRelatedWork W2785822124 @default.
- W4320021390 hasRelatedWork W4224304706 @default.
- W4320021390 hasRelatedWork W4327896625 @default.
- W4320021390 hasVolume "25" @default.
- W4320021390 isParatext "false" @default.
- W4320021390 isRetracted "false" @default.
- W4320021390 workType "article" @default.