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- W4320803558 abstract "Deposition of elements from organometallic compositions under the action of laser radiation has a great interest for maskless solid state technology in microelectronics and optoelectronics. Carbonyls of transitional metals such as Cr(CO) 6 , Mo(CO) 6 and Fe(CO) 5 were used in the present work. Deposition of elements in conditions of the present experiment was thermochemical - deposition under the action of cw CO 2 -laser radiation from Cr(CO) 6 vapors and photochemical - deposition under the action of KrF-laser radiation ( λ L = 2 48 nm) from Mo(CO) 6 , Fe(CO) 5 vapors;deoosition under the action of Ar + -laser radiation ( λ L =488 nm) from Fe(CO) 5 vapors." @default.
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- W4320803558 date "1996-01-01" @default.
- W4320803558 modified "2023-09-26" @default.
- W4320803558 title "Deposition of Elements from Organometallic Compositions under the Action of Laser Radiation" @default.
- W4320803558 doi "https://doi.org/10.1364/cleo_europe.1996.cwf70" @default.
- W4320803558 hasPublicationYear "1996" @default.
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