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- W4320804080 abstract "Laser-micromachining of steel and glass with laser pulses below 100 fs, and even as short as 5 fs, exhibit unreached ultimate processing precision. Recent experimental studies of dielectrics in the pulse duration domain τ ≥ 140 fs [1,2,3] and even down to 20 fs [4,5] and 5 fs [6] showed that impact (avalanche) and multiphoton ionization contribute to the ablation process. Heat affected zones reached in the pulse duration domaine between 5 and 100 fs are of the same order as have been observed with longer sub-picosecond pulses (e.g. 300 fs). However, multiphoton absorption at lowest pulse durations and maximum intensities, respectively, yield a maximum energy containment in the irradiated material. It is shown that this reduces the ablation depths below values achieved by conventional sub-picosecond pulse laser systems. This and a substantial decrease of the ablation threshold fluence in respect of pulse laser processing with pulses in the picosecond and nanosecond range opens a new field of ultraprecision dry etching in micro- and nanotechnology." @default.
- W4320804080 created "2023-02-15" @default.
- W4320804080 creator A5004108407 @default.
- W4320804080 creator A5022585209 @default.
- W4320804080 creator A5029177011 @default.
- W4320804080 creator A5049801219 @default.
- W4320804080 creator A5050545972 @default.
- W4320804080 creator A5079644634 @default.
- W4320804080 date "1998-01-01" @default.
- W4320804080 modified "2023-10-14" @default.
- W4320804080 title "Ultimate Precision in Micromachining due to Extreme Energy Containment by Laser Pulses down to 5 fs" @default.
- W4320804080 cites W1985436984 @default.
- W4320804080 cites W2011493114 @default.
- W4320804080 cites W2017564016 @default.
- W4320804080 cites W2063496488 @default.
- W4320804080 cites W2137959463 @default.
- W4320804080 doi "https://doi.org/10.1364/cleo_europe.1998.cthd2" @default.
- W4320804080 hasPublicationYear "1998" @default.
- W4320804080 type Work @default.
- W4320804080 citedByCount "0" @default.
- W4320804080 crossrefType "proceedings-article" @default.
- W4320804080 hasAuthorship W4320804080A5004108407 @default.
- W4320804080 hasAuthorship W4320804080A5022585209 @default.
- W4320804080 hasAuthorship W4320804080A5029177011 @default.
- W4320804080 hasAuthorship W4320804080A5049801219 @default.
- W4320804080 hasAuthorship W4320804080A5050545972 @default.
- W4320804080 hasAuthorship W4320804080A5079644634 @default.
- W4320804080 hasConcept C120665830 @default.
- W4320804080 hasConcept C121332964 @default.
- W4320804080 hasConcept C127413603 @default.
- W4320804080 hasConcept C136525101 @default.
- W4320804080 hasConcept C142724271 @default.
- W4320804080 hasConcept C145667562 @default.
- W4320804080 hasConcept C146978453 @default.
- W4320804080 hasConcept C169150495 @default.
- W4320804080 hasConcept C192562407 @default.
- W4320804080 hasConcept C204787440 @default.
- W4320804080 hasConcept C22078206 @default.
- W4320804080 hasConcept C2778902805 @default.
- W4320804080 hasConcept C2779188808 @default.
- W4320804080 hasConcept C2780167933 @default.
- W4320804080 hasConcept C49040817 @default.
- W4320804080 hasConcept C51141536 @default.
- W4320804080 hasConcept C520434653 @default.
- W4320804080 hasConcept C55005982 @default.
- W4320804080 hasConcept C71924100 @default.
- W4320804080 hasConcept C94915269 @default.
- W4320804080 hasConceptScore W4320804080C120665830 @default.
- W4320804080 hasConceptScore W4320804080C121332964 @default.
- W4320804080 hasConceptScore W4320804080C127413603 @default.
- W4320804080 hasConceptScore W4320804080C136525101 @default.
- W4320804080 hasConceptScore W4320804080C142724271 @default.
- W4320804080 hasConceptScore W4320804080C145667562 @default.
- W4320804080 hasConceptScore W4320804080C146978453 @default.
- W4320804080 hasConceptScore W4320804080C169150495 @default.
- W4320804080 hasConceptScore W4320804080C192562407 @default.
- W4320804080 hasConceptScore W4320804080C204787440 @default.
- W4320804080 hasConceptScore W4320804080C22078206 @default.
- W4320804080 hasConceptScore W4320804080C2778902805 @default.
- W4320804080 hasConceptScore W4320804080C2779188808 @default.
- W4320804080 hasConceptScore W4320804080C2780167933 @default.
- W4320804080 hasConceptScore W4320804080C49040817 @default.
- W4320804080 hasConceptScore W4320804080C51141536 @default.
- W4320804080 hasConceptScore W4320804080C520434653 @default.
- W4320804080 hasConceptScore W4320804080C55005982 @default.
- W4320804080 hasConceptScore W4320804080C71924100 @default.
- W4320804080 hasConceptScore W4320804080C94915269 @default.
- W4320804080 hasLocation W43208040801 @default.
- W4320804080 hasOpenAccess W4320804080 @default.
- W4320804080 hasPrimaryLocation W43208040801 @default.
- W4320804080 hasRelatedWork W122835787 @default.
- W4320804080 hasRelatedWork W1996169546 @default.
- W4320804080 hasRelatedWork W2019038989 @default.
- W4320804080 hasRelatedWork W2054610802 @default.
- W4320804080 hasRelatedWork W2320058595 @default.
- W4320804080 hasRelatedWork W2559746644 @default.
- W4320804080 hasRelatedWork W2895877096 @default.
- W4320804080 hasRelatedWork W3021469066 @default.
- W4320804080 hasRelatedWork W3091894956 @default.
- W4320804080 hasRelatedWork W4320804080 @default.
- W4320804080 isParatext "false" @default.
- W4320804080 isRetracted "false" @default.
- W4320804080 workType "article" @default.