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- W4320804927 abstract "During the past several years there have been many investigations of UV laser cleaning of surfaces, including dielectrics and semiconductors. There has been little discussion of surface or bulk optical damage that might accompany UV laser cleaning. It is generally assumed and/or demonstrated that the threshold fluence for optical damage is significantly larger than the cleaning fluence for the particular material. However, it is a well known fact that any surface contamination reduces the fluence threshold for surface optical damage." @default.
- W4320804927 created "2023-02-15" @default.
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- W4320804927 date "1998-01-01" @default.
- W4320804927 modified "2023-09-27" @default.
- W4320804927 title "Laser Induced Surface Optical Damage Associated with UV Laser Cleaning of Sub-micron Contaminant Particles from Glass Surfaces" @default.
- W4320804927 doi "https://doi.org/10.1364/cleo_europe.1998.cthh72" @default.
- W4320804927 hasPublicationYear "1998" @default.
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