Matches in SemOpenAlex for { <https://semopenalex.org/work/W4320804931> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W4320804931 abstract "Laser annealing of semiconductor layers by irradiation directed to the backside of the substrate is promising technique for modification of implanted layers and semiconductor structures. This technique allows to recrystallize the buried layers without disruption of the surface. However, the using of the industrial lasers with λ=1.06 µm for the backside annealing of silicon structures is ineffective, due to the screening of the powerful irradiation by the silicon substrate." @default.
- W4320804931 created "2023-02-15" @default.
- W4320804931 creator A5008943363 @default.
- W4320804931 creator A5021866530 @default.
- W4320804931 creator A5087667212 @default.
- W4320804931 creator A5031287585 @default.
- W4320804931 date "1998-01-01" @default.
- W4320804931 modified "2023-10-16" @default.
- W4320804931 title "Backside-laser annealing of silicon at low temperature" @default.
- W4320804931 doi "https://doi.org/10.1364/cleo_europe.1998.cthh91" @default.
- W4320804931 hasPublicationYear "1998" @default.
- W4320804931 type Work @default.
- W4320804931 citedByCount "0" @default.
- W4320804931 crossrefType "proceedings-article" @default.
- W4320804931 hasAuthorship W4320804931A5008943363 @default.
- W4320804931 hasAuthorship W4320804931A5021866530 @default.
- W4320804931 hasAuthorship W4320804931A5031287585 @default.
- W4320804931 hasAuthorship W4320804931A5087667212 @default.
- W4320804931 hasConcept C108225325 @default.
- W4320804931 hasConcept C111337013 @default.
- W4320804931 hasConcept C111368507 @default.
- W4320804931 hasConcept C120665830 @default.
- W4320804931 hasConcept C121332964 @default.
- W4320804931 hasConcept C121477167 @default.
- W4320804931 hasConcept C127313418 @default.
- W4320804931 hasConcept C139159486 @default.
- W4320804931 hasConcept C159985019 @default.
- W4320804931 hasConcept C185544564 @default.
- W4320804931 hasConcept C192562407 @default.
- W4320804931 hasConcept C2777289219 @default.
- W4320804931 hasConcept C2777855556 @default.
- W4320804931 hasConcept C2779227376 @default.
- W4320804931 hasConcept C2989315489 @default.
- W4320804931 hasConcept C49040817 @default.
- W4320804931 hasConcept C520434653 @default.
- W4320804931 hasConcept C544956773 @default.
- W4320804931 hasConcept C79635011 @default.
- W4320804931 hasConceptScore W4320804931C108225325 @default.
- W4320804931 hasConceptScore W4320804931C111337013 @default.
- W4320804931 hasConceptScore W4320804931C111368507 @default.
- W4320804931 hasConceptScore W4320804931C120665830 @default.
- W4320804931 hasConceptScore W4320804931C121332964 @default.
- W4320804931 hasConceptScore W4320804931C121477167 @default.
- W4320804931 hasConceptScore W4320804931C127313418 @default.
- W4320804931 hasConceptScore W4320804931C139159486 @default.
- W4320804931 hasConceptScore W4320804931C159985019 @default.
- W4320804931 hasConceptScore W4320804931C185544564 @default.
- W4320804931 hasConceptScore W4320804931C192562407 @default.
- W4320804931 hasConceptScore W4320804931C2777289219 @default.
- W4320804931 hasConceptScore W4320804931C2777855556 @default.
- W4320804931 hasConceptScore W4320804931C2779227376 @default.
- W4320804931 hasConceptScore W4320804931C2989315489 @default.
- W4320804931 hasConceptScore W4320804931C49040817 @default.
- W4320804931 hasConceptScore W4320804931C520434653 @default.
- W4320804931 hasConceptScore W4320804931C544956773 @default.
- W4320804931 hasConceptScore W4320804931C79635011 @default.
- W4320804931 hasLocation W43208049311 @default.
- W4320804931 hasOpenAccess W4320804931 @default.
- W4320804931 hasPrimaryLocation W43208049311 @default.
- W4320804931 hasRelatedWork W104291876 @default.
- W4320804931 hasRelatedWork W1515869541 @default.
- W4320804931 hasRelatedWork W2080096833 @default.
- W4320804931 hasRelatedWork W2169019757 @default.
- W4320804931 hasRelatedWork W2364165521 @default.
- W4320804931 hasRelatedWork W2367354241 @default.
- W4320804931 hasRelatedWork W2528406610 @default.
- W4320804931 hasRelatedWork W2921767964 @default.
- W4320804931 hasRelatedWork W4221077969 @default.
- W4320804931 hasRelatedWork W4320804931 @default.
- W4320804931 isParatext "false" @default.
- W4320804931 isRetracted "false" @default.
- W4320804931 workType "article" @default.