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• W4320920616 abstract "The rotating polarizer spectroscopic ellipsometer (RPSE) has many advantages, such as simple optical configuration and broadband achromatism. However, the final performances of the RPSE will be significantly degraded by the residual polarization in light source. Therefore, we propose a three-step method to calibrate and correct the residual polarization in the light source of the RPSE. We establish a system model to describe the RPSE system considering the residual polarization in light source, in which two parameters b and c in the Stokes vectors of the light source are introduced to characterize the residual polarization. The three-step method including two global calibrations and one wavelength by wavelength calibration aims to obtain the accurate systemic parameters and b, c of the RPSE. And we develop an RPSE instrument to verify the three-step calibration method experimentally. The accuracy of corrected results considering the residual polarization is improved dramatically compared with the uncorrected results. Apart from the rotating polarizer ellipsometer, the calibration method implemented in this work is also applicable to other broadband rotating element ellipsometers." @default.
• W4320920616 created "2023-02-16" @default.
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• W4320920616 date "2023-03-01" @default.
• W4320920616 modified "2023-09-25" @default.
• W4320920616 title "Calibration of residual polarization in light source for broadband rotating polarizer spectroscopic ellipsometer" @default.
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• W4320920616 doi "https://doi.org/10.1016/j.tsf.2023.139739" @default.
• W4320920616 hasPublicationYear "2023" @default.
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