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- W4320930060 abstract "Good illumination uniformity at the mask and wafer planes, and high wafer throughput in the EUVL front-end test bed facility at LLNL require graded period multilayer (ML) coatings on several of the optics. The ML deposition was accomplished using a newly developed deposition technique which avoids the use of uniformity masks to define the spatial dependence of the ML period variation. The capabilities of the process in providing the specified ML coatings are discussed for both EUVL condenser and imaging systems." @default.
- W4320930060 created "2023-02-16" @default.
- W4320930060 creator A5046948799 @default.
- W4320930060 creator A5052958615 @default.
- W4320930060 creator A5062070303 @default.
- W4320930060 creator A5072269706 @default.
- W4320930060 date "1994-01-01" @default.
- W4320930060 modified "2023-09-24" @default.
- W4320930060 title "Multilayer Coatings for the EUV Lithography Front-End Test Bed" @default.
- W4320930060 cites W1997514999 @default.
- W4320930060 cites W2036837577 @default.
- W4320930060 cites W2041494203 @default.
- W4320930060 doi "https://doi.org/10.1364/eul.1994.ec.33" @default.
- W4320930060 hasPublicationYear "1994" @default.
- W4320930060 type Work @default.
- W4320930060 citedByCount "0" @default.
- W4320930060 crossrefType "proceedings-article" @default.
- W4320930060 hasAuthorship W4320930060A5046948799 @default.
- W4320930060 hasAuthorship W4320930060A5052958615 @default.
- W4320930060 hasAuthorship W4320930060A5062070303 @default.
- W4320930060 hasAuthorship W4320930060A5072269706 @default.
- W4320930060 hasConcept C105487726 @default.
- W4320930060 hasConcept C120665830 @default.
- W4320930060 hasConcept C121332964 @default.
- W4320930060 hasConcept C151730666 @default.
- W4320930060 hasConcept C157764524 @default.
- W4320930060 hasConcept C160671074 @default.
- W4320930060 hasConcept C162996421 @default.
- W4320930060 hasConcept C192562407 @default.
- W4320930060 hasConcept C195766429 @default.
- W4320930060 hasConcept C204223013 @default.
- W4320930060 hasConcept C2780934509 @default.
- W4320930060 hasConcept C2816523 @default.
- W4320930060 hasConcept C2982854487 @default.
- W4320930060 hasConcept C41008148 @default.
- W4320930060 hasConcept C49040817 @default.
- W4320930060 hasConcept C555944384 @default.
- W4320930060 hasConcept C64297162 @default.
- W4320930060 hasConcept C76155785 @default.
- W4320930060 hasConcept C86803240 @default.
- W4320930060 hasConceptScore W4320930060C105487726 @default.
- W4320930060 hasConceptScore W4320930060C120665830 @default.
- W4320930060 hasConceptScore W4320930060C121332964 @default.
- W4320930060 hasConceptScore W4320930060C151730666 @default.
- W4320930060 hasConceptScore W4320930060C157764524 @default.
- W4320930060 hasConceptScore W4320930060C160671074 @default.
- W4320930060 hasConceptScore W4320930060C162996421 @default.
- W4320930060 hasConceptScore W4320930060C192562407 @default.
- W4320930060 hasConceptScore W4320930060C195766429 @default.
- W4320930060 hasConceptScore W4320930060C204223013 @default.
- W4320930060 hasConceptScore W4320930060C2780934509 @default.
- W4320930060 hasConceptScore W4320930060C2816523 @default.
- W4320930060 hasConceptScore W4320930060C2982854487 @default.
- W4320930060 hasConceptScore W4320930060C41008148 @default.
- W4320930060 hasConceptScore W4320930060C49040817 @default.
- W4320930060 hasConceptScore W4320930060C555944384 @default.
- W4320930060 hasConceptScore W4320930060C64297162 @default.
- W4320930060 hasConceptScore W4320930060C76155785 @default.
- W4320930060 hasConceptScore W4320930060C86803240 @default.
- W4320930060 hasLocation W43209300601 @default.
- W4320930060 hasOpenAccess W4320930060 @default.
- W4320930060 hasPrimaryLocation W43209300601 @default.
- W4320930060 hasRelatedWork W1987937699 @default.
- W4320930060 hasRelatedWork W1988315734 @default.
- W4320930060 hasRelatedWork W2021096143 @default.
- W4320930060 hasRelatedWork W2077286051 @default.
- W4320930060 hasRelatedWork W2079561922 @default.
- W4320930060 hasRelatedWork W2091876690 @default.
- W4320930060 hasRelatedWork W2341213766 @default.
- W4320930060 hasRelatedWork W2949282974 @default.
- W4320930060 hasRelatedWork W4320930060 @default.
- W4320930060 hasRelatedWork W2088294812 @default.
- W4320930060 isParatext "false" @default.
- W4320930060 isRetracted "false" @default.
- W4320930060 workType "article" @default.