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- W4320930227 abstract "Research activities on the development of basic technologies for EUVL at Nikon, which include debris elimination of a laser plasma x-ray source, 3-mirror ring-field projection optics design, ring-field Köhler-critical illumination system design, asphere fabrication by partially corrective polishing, and electroplated reflection masks, are described." @default.
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- W4320930227 date "1996-01-01" @default.
- W4320930227 modified "2023-09-30" @default.
- W4320930227 title "Basic Technologies for Extreme Ultraviolet Lithography" @default.
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- W4320930227 doi "https://doi.org/10.1364/eul.1996.eww16" @default.
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