Matches in SemOpenAlex for { <https://semopenalex.org/work/W4321022108> ?p ?o ?g. }
- W4321022108 endingPage "6606" @default.
- W4321022108 startingPage "6596" @default.
- W4321022108 abstract "MEMS accelerometers have benefits of low cost and small volume; however, their long-term stability is limited by the fabrication mismatches. This article proposes a self-test and calibration technique for differential MEMS accelerometers, to reduce the effect of flicker noise in reference voltages due to nonlinear stiffness mismatch in two channels. Through detecting the frequency response induced by the sinusoidal test signal, the oscillating amplitude of the two channels is properly adjusted to meet a theoretically derived noise cancellation condition. A numerical model is established based on the practical mechanical parameters of the MEMS structures to simulate the proposed system and optimize the key design parameters. Finally, a prototype including a MEMS accelerometer chip and an FPGA-based control circuit is implemented to verify the suggested approaches. Compared with that without the proposed technique, the 1-h bias instability of the silicon oscillating accelerometer (SOA) is reduced from 6.31 to <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$3.44 mu text{g}$ </tex-math></inline-formula> . At different reference voltages from 1.09 to 1.33 V, the decrease in instability is between 21.7% and 45.5%." @default.
- W4321022108 created "2023-02-17" @default.
- W4321022108 creator A5020021664 @default.
- W4321022108 creator A5033830330 @default.
- W4321022108 creator A5035036940 @default.
- W4321022108 creator A5037529768 @default.
- W4321022108 creator A5040054935 @default.
- W4321022108 creator A5045329560 @default.
- W4321022108 creator A5051238737 @default.
- W4321022108 creator A5056657986 @default.
- W4321022108 creator A5059043638 @default.
- W4321022108 creator A5088380372 @default.
- W4321022108 date "2023-04-01" @default.
- W4321022108 modified "2023-09-27" @default.
- W4321022108 title "A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers" @default.
- W4321022108 cites W1564094976 @default.
- W4321022108 cites W1789412032 @default.
- W4321022108 cites W1896918315 @default.
- W4321022108 cites W2006594940 @default.
- W4321022108 cites W2032538899 @default.
- W4321022108 cites W2041499700 @default.
- W4321022108 cites W2088624854 @default.
- W4321022108 cites W2114181325 @default.
- W4321022108 cites W2124581236 @default.
- W4321022108 cites W2147539712 @default.
- W4321022108 cites W2161073019 @default.
- W4321022108 cites W2164673496 @default.
- W4321022108 cites W2341295932 @default.
- W4321022108 cites W2539425032 @default.
- W4321022108 cites W2580752875 @default.
- W4321022108 cites W2838556372 @default.
- W4321022108 cites W3119507340 @default.
- W4321022108 cites W3169952129 @default.
- W4321022108 cites W3203567326 @default.
- W4321022108 cites W3213678435 @default.
- W4321022108 cites W4206481579 @default.
- W4321022108 cites W4229009735 @default.
- W4321022108 cites W53274673 @default.
- W4321022108 doi "https://doi.org/10.1109/jsen.2023.3243830" @default.
- W4321022108 hasPublicationYear "2023" @default.
- W4321022108 type Work @default.
- W4321022108 citedByCount "0" @default.
- W4321022108 crossrefType "journal-article" @default.
- W4321022108 hasAuthorship W4321022108A5020021664 @default.
- W4321022108 hasAuthorship W4321022108A5033830330 @default.
- W4321022108 hasAuthorship W4321022108A5035036940 @default.
- W4321022108 hasAuthorship W4321022108A5037529768 @default.
- W4321022108 hasAuthorship W4321022108A5040054935 @default.
- W4321022108 hasAuthorship W4321022108A5045329560 @default.
- W4321022108 hasAuthorship W4321022108A5051238737 @default.
- W4321022108 hasAuthorship W4321022108A5056657986 @default.
- W4321022108 hasAuthorship W4321022108A5059043638 @default.
- W4321022108 hasAuthorship W4321022108A5088380372 @default.
- W4321022108 hasConcept C111919701 @default.
- W4321022108 hasConcept C115961682 @default.
- W4321022108 hasConcept C121332964 @default.
- W4321022108 hasConcept C127413603 @default.
- W4321022108 hasConcept C154945302 @default.
- W4321022108 hasConcept C158622935 @default.
- W4321022108 hasConcept C165838908 @default.
- W4321022108 hasConcept C24326235 @default.
- W4321022108 hasConcept C2775924081 @default.
- W4321022108 hasConcept C37977207 @default.
- W4321022108 hasConcept C41008148 @default.
- W4321022108 hasConcept C47446073 @default.
- W4321022108 hasConcept C49040817 @default.
- W4321022108 hasConcept C62520636 @default.
- W4321022108 hasConcept C89805583 @default.
- W4321022108 hasConcept C99498987 @default.
- W4321022108 hasConceptScore W4321022108C111919701 @default.
- W4321022108 hasConceptScore W4321022108C115961682 @default.
- W4321022108 hasConceptScore W4321022108C121332964 @default.
- W4321022108 hasConceptScore W4321022108C127413603 @default.
- W4321022108 hasConceptScore W4321022108C154945302 @default.
- W4321022108 hasConceptScore W4321022108C158622935 @default.
- W4321022108 hasConceptScore W4321022108C165838908 @default.
- W4321022108 hasConceptScore W4321022108C24326235 @default.
- W4321022108 hasConceptScore W4321022108C2775924081 @default.
- W4321022108 hasConceptScore W4321022108C37977207 @default.
- W4321022108 hasConceptScore W4321022108C41008148 @default.
- W4321022108 hasConceptScore W4321022108C47446073 @default.
- W4321022108 hasConceptScore W4321022108C49040817 @default.
- W4321022108 hasConceptScore W4321022108C62520636 @default.
- W4321022108 hasConceptScore W4321022108C89805583 @default.
- W4321022108 hasConceptScore W4321022108C99498987 @default.
- W4321022108 hasFunder F4320321001 @default.
- W4321022108 hasFunder F4320335787 @default.
- W4321022108 hasIssue "7" @default.
- W4321022108 hasLocation W43210221081 @default.
- W4321022108 hasOpenAccess W4321022108 @default.
- W4321022108 hasPrimaryLocation W43210221081 @default.
- W4321022108 hasRelatedWork W1658383795 @default.
- W4321022108 hasRelatedWork W2021577396 @default.
- W4321022108 hasRelatedWork W2110096916 @default.
- W4321022108 hasRelatedWork W2171863467 @default.
- W4321022108 hasRelatedWork W2276575750 @default.
- W4321022108 hasRelatedWork W2604601985 @default.
- W4321022108 hasRelatedWork W2728135488 @default.