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- W4321074109 abstract "As electronic and magnetic devices continue to become smaller, the need for fabricating structures on the nanometer scale grows larger. In lithographic techniques, the fundamental limitation in making nanoscale structures is imposed by diffraction effects which limit the size of the structures to the order of the wavelength of light used. Consequently, technologies are being driven towards using photons of shorter wavelength and/or high energy electrons or ions to produce structures with the highest resolution." @default.
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- W4321074109 date "1995-01-01" @default.
- W4321074109 modified "2023-09-30" @default.
- W4321074109 title "Nanostructure fabrication via atom optics" @default.
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- W4321074109 doi "https://doi.org/10.1364/msnp.1995.mthb3" @default.
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