Matches in SemOpenAlex for { <https://semopenalex.org/work/W4321075966> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W4321075966 abstract "In commercial practice, single-crystal semiconductors are etched using reactive gases in plasma discharges. Rational design of such processes requires quantitative models of the kinetics of the surface reactions by which substrate atoms are removed as volatile species, usually fluorides or chlorides. Because of the complexity of plasma etching, single-effect experiments, in which only the chemistry of the surface reactions are investigated, are very useful." @default.
- W4321075966 created "2023-02-17" @default.
- W4321075966 creator A5070462636 @default.
- W4321075966 date "1987-01-01" @default.
- W4321075966 modified "2023-10-16" @default.
- W4321075966 title "Modulated Molecular Beam Studies of Semiconductor Etching" @default.
- W4321075966 doi "https://doi.org/10.1364/msba.1987.mc1" @default.
- W4321075966 hasPublicationYear "1987" @default.
- W4321075966 type Work @default.
- W4321075966 citedByCount "0" @default.
- W4321075966 crossrefType "proceedings-article" @default.
- W4321075966 hasAuthorship W4321075966A5070462636 @default.
- W4321075966 hasConcept C100460472 @default.
- W4321075966 hasConcept C107187091 @default.
- W4321075966 hasConcept C108225325 @default.
- W4321075966 hasConcept C111368507 @default.
- W4321075966 hasConcept C121332964 @default.
- W4321075966 hasConcept C127313418 @default.
- W4321075966 hasConcept C1291036 @default.
- W4321075966 hasConcept C130472188 @default.
- W4321075966 hasConcept C148898269 @default.
- W4321075966 hasConcept C159467904 @default.
- W4321075966 hasConcept C171250308 @default.
- W4321075966 hasConcept C178790620 @default.
- W4321075966 hasConcept C185592680 @default.
- W4321075966 hasConcept C192562407 @default.
- W4321075966 hasConcept C199360897 @default.
- W4321075966 hasConcept C2777289219 @default.
- W4321075966 hasConcept C2779227376 @default.
- W4321075966 hasConcept C2781285689 @default.
- W4321075966 hasConcept C2985119592 @default.
- W4321075966 hasConcept C32909587 @default.
- W4321075966 hasConcept C41008148 @default.
- W4321075966 hasConcept C49040817 @default.
- W4321075966 hasConcept C54419926 @default.
- W4321075966 hasConcept C62520636 @default.
- W4321075966 hasConcept C82706917 @default.
- W4321075966 hasConceptScore W4321075966C100460472 @default.
- W4321075966 hasConceptScore W4321075966C107187091 @default.
- W4321075966 hasConceptScore W4321075966C108225325 @default.
- W4321075966 hasConceptScore W4321075966C111368507 @default.
- W4321075966 hasConceptScore W4321075966C121332964 @default.
- W4321075966 hasConceptScore W4321075966C127313418 @default.
- W4321075966 hasConceptScore W4321075966C1291036 @default.
- W4321075966 hasConceptScore W4321075966C130472188 @default.
- W4321075966 hasConceptScore W4321075966C148898269 @default.
- W4321075966 hasConceptScore W4321075966C159467904 @default.
- W4321075966 hasConceptScore W4321075966C171250308 @default.
- W4321075966 hasConceptScore W4321075966C178790620 @default.
- W4321075966 hasConceptScore W4321075966C185592680 @default.
- W4321075966 hasConceptScore W4321075966C192562407 @default.
- W4321075966 hasConceptScore W4321075966C199360897 @default.
- W4321075966 hasConceptScore W4321075966C2777289219 @default.
- W4321075966 hasConceptScore W4321075966C2779227376 @default.
- W4321075966 hasConceptScore W4321075966C2781285689 @default.
- W4321075966 hasConceptScore W4321075966C2985119592 @default.
- W4321075966 hasConceptScore W4321075966C32909587 @default.
- W4321075966 hasConceptScore W4321075966C41008148 @default.
- W4321075966 hasConceptScore W4321075966C49040817 @default.
- W4321075966 hasConceptScore W4321075966C54419926 @default.
- W4321075966 hasConceptScore W4321075966C62520636 @default.
- W4321075966 hasConceptScore W4321075966C82706917 @default.
- W4321075966 hasLocation W43210759661 @default.
- W4321075966 hasOpenAccess W4321075966 @default.
- W4321075966 hasPrimaryLocation W43210759661 @default.
- W4321075966 hasRelatedWork W1986965160 @default.
- W4321075966 hasRelatedWork W2011001474 @default.
- W4321075966 hasRelatedWork W2031418563 @default.
- W4321075966 hasRelatedWork W2035159056 @default.
- W4321075966 hasRelatedWork W2139606557 @default.
- W4321075966 hasRelatedWork W2366161362 @default.
- W4321075966 hasRelatedWork W2896601243 @default.
- W4321075966 hasRelatedWork W2923172560 @default.
- W4321075966 hasRelatedWork W3197419717 @default.
- W4321075966 hasRelatedWork W4321075966 @default.
- W4321075966 isParatext "false" @default.
- W4321075966 isRetracted "false" @default.
- W4321075966 workType "article" @default.