Matches in SemOpenAlex for { <https://semopenalex.org/work/W4321134530> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W4321134530 abstract "We show that, contrary to the prevailing trend in photolithography, increasing the spatial coherence of illumination does not necessarily improve the performance of phase masks in enhancing resolution and focal depth. Simulations and experiments show that for large (aperiodic) phase masks, the optimal coherence diameter is determined by the minimum resolvable feature size, not the size of the mask. This is due to a trade-off between the destructive interference of adjacent features under coherent illumination and the larger effective aperture of incoherent illumination." @default.
- W4321134530 created "2023-02-18" @default.
- W4321134530 creator A5016920092 @default.
- W4321134530 creator A5066379659 @default.
- W4321134530 date "1996-01-01" @default.
- W4321134530 modified "2023-09-23" @default.
- W4321134530 title "Effect of spatial coherence on photolithographic phase mask performance" @default.
- W4321134530 doi "https://doi.org/10.1364/holography.1996.jtub28.1" @default.
- W4321134530 hasPublicationYear "1996" @default.
- W4321134530 type Work @default.
- W4321134530 citedByCount "0" @default.
- W4321134530 crossrefType "proceedings-article" @default.
- W4321134530 hasAuthorship W4321134530A5016920092 @default.
- W4321134530 hasAuthorship W4321134530A5066379659 @default.
- W4321134530 hasConcept C104247578 @default.
- W4321134530 hasConcept C105487726 @default.
- W4321134530 hasConcept C114614502 @default.
- W4321134530 hasConcept C120665830 @default.
- W4321134530 hasConcept C121332964 @default.
- W4321134530 hasConcept C127162648 @default.
- W4321134530 hasConcept C138885662 @default.
- W4321134530 hasConcept C159108749 @default.
- W4321134530 hasConcept C168553754 @default.
- W4321134530 hasConcept C192562407 @default.
- W4321134530 hasConcept C205372480 @default.
- W4321134530 hasConcept C24890656 @default.
- W4321134530 hasConcept C2776401178 @default.
- W4321134530 hasConcept C2781181686 @default.
- W4321134530 hasConcept C2985909886 @default.
- W4321134530 hasConcept C32022120 @default.
- W4321134530 hasConcept C33923547 @default.
- W4321134530 hasConcept C41008148 @default.
- W4321134530 hasConcept C41895202 @default.
- W4321134530 hasConcept C44280652 @default.
- W4321134530 hasConcept C47091857 @default.
- W4321134530 hasConcept C54101563 @default.
- W4321134530 hasConcept C62520636 @default.
- W4321134530 hasConcept C6260449 @default.
- W4321134530 hasConcept C76155785 @default.
- W4321134530 hasConcept C78336883 @default.
- W4321134530 hasConceptScore W4321134530C104247578 @default.
- W4321134530 hasConceptScore W4321134530C105487726 @default.
- W4321134530 hasConceptScore W4321134530C114614502 @default.
- W4321134530 hasConceptScore W4321134530C120665830 @default.
- W4321134530 hasConceptScore W4321134530C121332964 @default.
- W4321134530 hasConceptScore W4321134530C127162648 @default.
- W4321134530 hasConceptScore W4321134530C138885662 @default.
- W4321134530 hasConceptScore W4321134530C159108749 @default.
- W4321134530 hasConceptScore W4321134530C168553754 @default.
- W4321134530 hasConceptScore W4321134530C192562407 @default.
- W4321134530 hasConceptScore W4321134530C205372480 @default.
- W4321134530 hasConceptScore W4321134530C24890656 @default.
- W4321134530 hasConceptScore W4321134530C2776401178 @default.
- W4321134530 hasConceptScore W4321134530C2781181686 @default.
- W4321134530 hasConceptScore W4321134530C2985909886 @default.
- W4321134530 hasConceptScore W4321134530C32022120 @default.
- W4321134530 hasConceptScore W4321134530C33923547 @default.
- W4321134530 hasConceptScore W4321134530C41008148 @default.
- W4321134530 hasConceptScore W4321134530C41895202 @default.
- W4321134530 hasConceptScore W4321134530C44280652 @default.
- W4321134530 hasConceptScore W4321134530C47091857 @default.
- W4321134530 hasConceptScore W4321134530C54101563 @default.
- W4321134530 hasConceptScore W4321134530C62520636 @default.
- W4321134530 hasConceptScore W4321134530C6260449 @default.
- W4321134530 hasConceptScore W4321134530C76155785 @default.
- W4321134530 hasConceptScore W4321134530C78336883 @default.
- W4321134530 hasLocation W43211345301 @default.
- W4321134530 hasOpenAccess W4321134530 @default.
- W4321134530 hasPrimaryLocation W43211345301 @default.
- W4321134530 hasRelatedWork W1983832339 @default.
- W4321134530 hasRelatedWork W1995086386 @default.
- W4321134530 hasRelatedWork W2028900096 @default.
- W4321134530 hasRelatedWork W2060072078 @default.
- W4321134530 hasRelatedWork W2166299137 @default.
- W4321134530 hasRelatedWork W2588956541 @default.
- W4321134530 hasRelatedWork W2606100131 @default.
- W4321134530 hasRelatedWork W2988526362 @default.
- W4321134530 hasRelatedWork W4320929895 @default.
- W4321134530 hasRelatedWork W4321134530 @default.
- W4321134530 isParatext "false" @default.
- W4321134530 isRetracted "false" @default.
- W4321134530 workType "article" @default.