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- W4321263488 abstract "MOXTEK has been experimenting with reactive ion sputtering to achieve better quality multilayers. These experiments have been successful, achieving high reflectivities in the 8–60-Å region of the soft x-ray spectrum. These multilayers have been able to achieve >70% of their theoretical reflectivity. I present the results of x-ray, Auger, and atomic resolution TEM analysis of these multilayers." @default.
- W4321263488 created "2023-02-18" @default.
- W4321263488 creator A5063622227 @default.
- W4321263488 date "1991-01-01" @default.
- W4321263488 modified "2023-10-01" @default.
- W4321263488 title "High reflectivity x-ray multilayers using reactive ion sputtering" @default.
- W4321263488 doi "https://doi.org/10.1364/oam.1991.tuee6" @default.
- W4321263488 hasPublicationYear "1991" @default.
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