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- W4321264840 abstract "Thin films of indium-tin-oxide (ITO) and indium oxide (IO) were deposited on sapphire, zinc selenide, and germanium substrates to study transparent conductive coatings for the 3.5–5.0 µ m and 8.0–12.0 µ m IR region. ITO films were prepared by rf planar magnetron sputtering of an indium-tin-oxide (10% tin) target in ultrapure argon gas (99.999% purity) at a pressure of about 9 mTorr and at a substrate temperature of about 300 K. Similarly, 10 films were prepared by reactive dc planar magnetron sputtering of a pure indium (99.99% purity) target in ultrapure argon and oxygen gases at a pressure of about 9 mTorr and at a substrate temperature of about 300 K. The use of planar magnetrons to deposit thin films offers a number of advantages over other deposition systems, including high deposition rates and the ability to scale to the larger sources and substrate areas necessary for industrial applications. Both techniques of deposition of transparent conductive films show extreme hardness, chemical inertness, high electrical resistivity, and optical transparency in the 3.5–5.0 µ m and 8.0–12.0 µ m IR region. For ITO coatings, typical values obtained for coated sapphire substrate in the 3.5–5.0 µ m region and zinc selenide substrate in the 8.0–12.0 µ m region were average transmittances of 75% and 62%, and sheet resistivities of 120 ohms/square and 150 ohms/square, respectively." @default.
- W4321264840 created "2023-02-18" @default.
- W4321264840 creator A5057519259 @default.
- W4321264840 creator A5065283583 @default.
- W4321264840 date "1990-01-01" @default.
- W4321264840 modified "2023-09-25" @default.
- W4321264840 title "IR transparent conductive coatings by rf and dc magnetrons" @default.
- W4321264840 doi "https://doi.org/10.1364/oam.1990.wp4" @default.
- W4321264840 hasPublicationYear "1990" @default.
- W4321264840 type Work @default.
- W4321264840 citedByCount "0" @default.
- W4321264840 crossrefType "proceedings-article" @default.
- W4321264840 hasAuthorship W4321264840A5057519259 @default.
- W4321264840 hasAuthorship W4321264840A5065283583 @default.
- W4321264840 hasConcept C111368507 @default.
- W4321264840 hasConcept C113196181 @default.
- W4321264840 hasConcept C127313418 @default.
- W4321264840 hasConcept C171250308 @default.
- W4321264840 hasConcept C17470697 @default.
- W4321264840 hasConcept C178790620 @default.
- W4321264840 hasConcept C185592680 @default.
- W4321264840 hasConcept C19067145 @default.
- W4321264840 hasConcept C192562407 @default.
- W4321264840 hasConcept C22423302 @default.
- W4321264840 hasConcept C2777289219 @default.
- W4321264840 hasConcept C2779227376 @default.
- W4321264840 hasConcept C2780334557 @default.
- W4321264840 hasConcept C32737372 @default.
- W4321264840 hasConcept C43617362 @default.
- W4321264840 hasConcept C49040817 @default.
- W4321264840 hasConcept C543292547 @default.
- W4321264840 hasConcept C547737533 @default.
- W4321264840 hasConcept C61427134 @default.
- W4321264840 hasConcept C66825105 @default.
- W4321264840 hasConceptScore W4321264840C111368507 @default.
- W4321264840 hasConceptScore W4321264840C113196181 @default.
- W4321264840 hasConceptScore W4321264840C127313418 @default.
- W4321264840 hasConceptScore W4321264840C171250308 @default.
- W4321264840 hasConceptScore W4321264840C17470697 @default.
- W4321264840 hasConceptScore W4321264840C178790620 @default.
- W4321264840 hasConceptScore W4321264840C185592680 @default.
- W4321264840 hasConceptScore W4321264840C19067145 @default.
- W4321264840 hasConceptScore W4321264840C192562407 @default.
- W4321264840 hasConceptScore W4321264840C22423302 @default.
- W4321264840 hasConceptScore W4321264840C2777289219 @default.
- W4321264840 hasConceptScore W4321264840C2779227376 @default.
- W4321264840 hasConceptScore W4321264840C2780334557 @default.
- W4321264840 hasConceptScore W4321264840C32737372 @default.
- W4321264840 hasConceptScore W4321264840C43617362 @default.
- W4321264840 hasConceptScore W4321264840C49040817 @default.
- W4321264840 hasConceptScore W4321264840C543292547 @default.
- W4321264840 hasConceptScore W4321264840C547737533 @default.
- W4321264840 hasConceptScore W4321264840C61427134 @default.
- W4321264840 hasConceptScore W4321264840C66825105 @default.
- W4321264840 hasLocation W43212648401 @default.
- W4321264840 hasOpenAccess W4321264840 @default.
- W4321264840 hasPrimaryLocation W43212648401 @default.
- W4321264840 hasRelatedWork W2065783086 @default.
- W4321264840 hasRelatedWork W2069058744 @default.
- W4321264840 hasRelatedWork W2086744665 @default.
- W4321264840 hasRelatedWork W2359832175 @default.
- W4321264840 hasRelatedWork W2373012329 @default.
- W4321264840 hasRelatedWork W2389286191 @default.
- W4321264840 hasRelatedWork W2526521535 @default.
- W4321264840 hasRelatedWork W2586313457 @default.
- W4321264840 hasRelatedWork W2891507978 @default.
- W4321264840 hasRelatedWork W4282020392 @default.
- W4321264840 isParatext "false" @default.
- W4321264840 isRetracted "false" @default.
- W4321264840 workType "article" @default.