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- W4321273670 abstract "The performance requirements of optical lithography equipment are driven by DRAM memory chips which require a 30% reduction in line width and a three-fold increase in resolution elements every generation. Until now semiconductor chips were small enough that arrays of them could be placed in the field of a lithography lens. This placed the emphasis on higher resolution for each new lens generation. The development of the 16-Mb DRAM has changed our priorities. The next generation of memory chips and all those to follow will require substantial increases in field sizes as well as resolution and therefore a more aggressive development pace. Within only a few short generations, conventional resolution lenses will approach 500 lb in weight and $1M in cost." @default.
- W4321273670 created "2023-02-18" @default.
- W4321273670 creator A5063609177 @default.
- W4321273670 date "1990-01-01" @default.
- W4321273670 modified "2023-09-27" @default.
- W4321273670 title "Limits of optical lithography" @default.
- W4321273670 doi "https://doi.org/10.1364/oam.1990.mp2" @default.
- W4321273670 hasPublicationYear "1990" @default.
- W4321273670 type Work @default.
- W4321273670 citedByCount "0" @default.
- W4321273670 crossrefType "proceedings-article" @default.
- W4321273670 hasAuthorship W4321273670A5063609177 @default.
- W4321273670 hasConcept C120665830 @default.
- W4321273670 hasConcept C121332964 @default.
- W4321273670 hasConcept C15336307 @default.
- W4321273670 hasConcept C163581340 @default.
- W4321273670 hasConcept C171250308 @default.
- W4321273670 hasConcept C177409738 @default.
- W4321273670 hasConcept C182873914 @default.
- W4321273670 hasConcept C192562407 @default.
- W4321273670 hasConcept C200274948 @default.
- W4321273670 hasConcept C204223013 @default.
- W4321273670 hasConcept C2779227376 @default.
- W4321273670 hasConcept C41008148 @default.
- W4321273670 hasConcept C49040817 @default.
- W4321273670 hasConcept C53524968 @default.
- W4321273670 hasConcept C7366592 @default.
- W4321273670 hasConcept C94263209 @default.
- W4321273670 hasConceptScore W4321273670C120665830 @default.
- W4321273670 hasConceptScore W4321273670C121332964 @default.
- W4321273670 hasConceptScore W4321273670C15336307 @default.
- W4321273670 hasConceptScore W4321273670C163581340 @default.
- W4321273670 hasConceptScore W4321273670C171250308 @default.
- W4321273670 hasConceptScore W4321273670C177409738 @default.
- W4321273670 hasConceptScore W4321273670C182873914 @default.
- W4321273670 hasConceptScore W4321273670C192562407 @default.
- W4321273670 hasConceptScore W4321273670C200274948 @default.
- W4321273670 hasConceptScore W4321273670C204223013 @default.
- W4321273670 hasConceptScore W4321273670C2779227376 @default.
- W4321273670 hasConceptScore W4321273670C41008148 @default.
- W4321273670 hasConceptScore W4321273670C49040817 @default.
- W4321273670 hasConceptScore W4321273670C53524968 @default.
- W4321273670 hasConceptScore W4321273670C7366592 @default.
- W4321273670 hasConceptScore W4321273670C94263209 @default.
- W4321273670 hasLocation W43212736701 @default.
- W4321273670 hasOpenAccess W4321273670 @default.
- W4321273670 hasPrimaryLocation W43212736701 @default.
- W4321273670 hasRelatedWork W1977820409 @default.
- W4321273670 hasRelatedWork W1985779859 @default.
- W4321273670 hasRelatedWork W1991236041 @default.
- W4321273670 hasRelatedWork W1995694374 @default.
- W4321273670 hasRelatedWork W2000620740 @default.
- W4321273670 hasRelatedWork W2033284723 @default.
- W4321273670 hasRelatedWork W2043410031 @default.
- W4321273670 hasRelatedWork W2054704405 @default.
- W4321273670 hasRelatedWork W2062627448 @default.
- W4321273670 hasRelatedWork W2084200994 @default.
- W4321273670 isParatext "false" @default.
- W4321273670 isRetracted "false" @default.
- W4321273670 workType "article" @default.