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- W4321517588 abstract "We evaluated ion plated and, for comparison, electron beam evaporated thin films with an ultra-microhardness tester used with an optical microscope. Implementations of the instrument for use inside a scanning electron microscope 1,2,3 and with a high resolution optical microscope 4 have been described in sufficient detail elsewhere. Figure 1 shows typical indentations made with a Vickers diamond in a rather thick ion plated single layer of TiO 2 in comparison with an indentation obtained in an electron beam evaporated film of the same material and similar thickness. The ultra-microhardness values resulting from the measurement of the imprint diagonal differ whether the indentations are observed and measured with an optical microscope or with a scanning electron microscope." @default.
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- W4321517588 date "1992-01-01" @default.
- W4321517588 modified "2023-09-28" @default.
- W4321517588 title "Ultra-Microhardness Testing and Mechanical Properties of Ceramic Optical Thin Films" @default.
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- W4321517588 doi "https://doi.org/10.1364/oic.1992.ofa6" @default.
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