Matches in SemOpenAlex for { <https://semopenalex.org/work/W4321520356> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W4321520356 abstract "The majority of work in the theory of thin film growth has been directed at studying two extreme regimes of the problem. On the one hand, there have been numerous investigations of heteroepitaxial growth of thin films under near-equilibrium conditions. At the other extreme, there has been interest in the morphology of films grown under highly nonequilibrium conditions where the surface mobility of the adatoms is severely limited, resulting in strong shadowing effects and nonlinear columnar growth modes. It has been found, however, that the best conditions for producing x-ray multilayer structures correspond to an intermediate regime, that being far from equilibrium but under sufficiently energetic conditions to promote layer formation. Although of considerable technical importance, there has been little theoretical attention paid to this intermediate regime. Experimentally, this growth regime is realized by bombarding the surface during deposition with a primary or secondary flux of energetic particles, such as is achieved in ion-assisted evaporation or sputtering at low pressures. Under these conditions the deposited layers are usually amorphous or nanocrystalline and the root-mean-square (rms) roughness of the interfaces can be maintained to < 5 Å throughout the multilayer, a condition required for good x-ray optical performance. In this paper we present a simple linearized, stochastic model for the growth of multilayer structures in this moderately energetic regime." @default.
- W4321520356 created "2023-02-24" @default.
- W4321520356 creator A5078464375 @default.
- W4321520356 date "1994-01-01" @default.
- W4321520356 modified "2023-10-16" @default.
- W4321520356 title "A Stochastic Model for Multilayer Growth" @default.
- W4321520356 cites W1982115118 @default.
- W4321520356 cites W1999010788 @default.
- W4321520356 cites W2040480857 @default.
- W4321520356 doi "https://doi.org/10.1364/pxrayms.1994.mc.9" @default.
- W4321520356 hasPublicationYear "1994" @default.
- W4321520356 type Work @default.
- W4321520356 citedByCount "0" @default.
- W4321520356 crossrefType "proceedings-article" @default.
- W4321520356 hasAuthorship W4321520356A5078464375 @default.
- W4321520356 hasConcept C107365816 @default.
- W4321520356 hasConcept C121332964 @default.
- W4321520356 hasConcept C140676511 @default.
- W4321520356 hasConcept C151730666 @default.
- W4321520356 hasConcept C158622935 @default.
- W4321520356 hasConcept C159467904 @default.
- W4321520356 hasConcept C159985019 @default.
- W4321520356 hasConcept C171250308 @default.
- W4321520356 hasConcept C185592680 @default.
- W4321520356 hasConcept C19067145 @default.
- W4321520356 hasConcept C192562407 @default.
- W4321520356 hasConcept C22423302 @default.
- W4321520356 hasConcept C26873012 @default.
- W4321520356 hasConcept C2816523 @default.
- W4321520356 hasConcept C56052488 @default.
- W4321520356 hasConcept C61441594 @default.
- W4321520356 hasConcept C62520636 @default.
- W4321520356 hasConcept C64297162 @default.
- W4321520356 hasConcept C71039073 @default.
- W4321520356 hasConcept C74859849 @default.
- W4321520356 hasConcept C8010536 @default.
- W4321520356 hasConcept C86803240 @default.
- W4321520356 hasConcept C97355855 @default.
- W4321520356 hasConceptScore W4321520356C107365816 @default.
- W4321520356 hasConceptScore W4321520356C121332964 @default.
- W4321520356 hasConceptScore W4321520356C140676511 @default.
- W4321520356 hasConceptScore W4321520356C151730666 @default.
- W4321520356 hasConceptScore W4321520356C158622935 @default.
- W4321520356 hasConceptScore W4321520356C159467904 @default.
- W4321520356 hasConceptScore W4321520356C159985019 @default.
- W4321520356 hasConceptScore W4321520356C171250308 @default.
- W4321520356 hasConceptScore W4321520356C185592680 @default.
- W4321520356 hasConceptScore W4321520356C19067145 @default.
- W4321520356 hasConceptScore W4321520356C192562407 @default.
- W4321520356 hasConceptScore W4321520356C22423302 @default.
- W4321520356 hasConceptScore W4321520356C26873012 @default.
- W4321520356 hasConceptScore W4321520356C2816523 @default.
- W4321520356 hasConceptScore W4321520356C56052488 @default.
- W4321520356 hasConceptScore W4321520356C61441594 @default.
- W4321520356 hasConceptScore W4321520356C62520636 @default.
- W4321520356 hasConceptScore W4321520356C64297162 @default.
- W4321520356 hasConceptScore W4321520356C71039073 @default.
- W4321520356 hasConceptScore W4321520356C74859849 @default.
- W4321520356 hasConceptScore W4321520356C8010536 @default.
- W4321520356 hasConceptScore W4321520356C86803240 @default.
- W4321520356 hasConceptScore W4321520356C97355855 @default.
- W4321520356 hasLocation W43215203561 @default.
- W4321520356 hasOpenAccess W4321520356 @default.
- W4321520356 hasPrimaryLocation W43215203561 @default.
- W4321520356 hasRelatedWork W1983193014 @default.
- W4321520356 hasRelatedWork W1991634294 @default.
- W4321520356 hasRelatedWork W1999721746 @default.
- W4321520356 hasRelatedWork W2519832218 @default.
- W4321520356 hasRelatedWork W2542179121 @default.
- W4321520356 hasRelatedWork W2811341166 @default.
- W4321520356 hasRelatedWork W4200269387 @default.
- W4321520356 hasRelatedWork W4214576511 @default.
- W4321520356 hasRelatedWork W4303438115 @default.
- W4321520356 hasRelatedWork W4324311194 @default.
- W4321520356 isParatext "false" @default.
- W4321520356 isRetracted "false" @default.
- W4321520356 workType "article" @default.