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- W4321641569 abstract "The VLSI revolution that is opening a new epoch in the electronics industry has made such remarkable progress that now 108 - 109 transistors can be fabricated on a single chip. VLSI microfabrication technologies are being pushed to new extremes by the DRAM community, thereby expediting research on 256 Mbit DRAMs using the 0.2 μm design rule. Giga-bit DRAMs and sophisticated ULSI processors using 0.1 μm Si-MOSFETs could possibly appear in the latter half of the 1990s. Recently, a very high speed ring oscillator has achieved 10 psec/gate for 77 K operation[1]. In the field of advanced bipolar transistors, a 64 GHz cut-off frequency has been reported[2]. These speeds are comparable to those of conventional quantum devices such as HEMTs (High electron mobility transistors)[3], JJs (Josephson junction devices)[4], and STrs (Superconducting transistors)[5] as shown in Fig. 1. In addition, device operation of 7-10 nm Si-MOSFETs (corresponding to 1-16 Tera-bit memories) [6] and single electron transistors (SET) [7] have been confirmed, which implies an increased importance for nano-meter fabrication technology. Si devices have a promising future, which will pave the way to the 21st century." @default.
- W4321641569 created "2023-02-24" @default.
- W4321641569 creator A5047877300 @default.
- W4321641569 date "1993-01-01" @default.
- W4321641569 modified "2023-10-14" @default.
- W4321641569 title "A Migration Path to Nano-Meter Lithography: From the viewpoint of VLSIs" @default.
- W4321641569 cites W1976480518 @default.
- W4321641569 cites W1978603681 @default.
- W4321641569 cites W2022146634 @default.
- W4321641569 cites W2060328325 @default.
- W4321641569 cites W2065117001 @default.
- W4321641569 cites W2080906776 @default.
- W4321641569 cites W2100947501 @default.
- W4321641569 cites W2151703212 @default.
- W4321641569 doi "https://doi.org/10.1364/sxray.1993.tua.1" @default.
- W4321641569 hasPublicationYear "1993" @default.
- W4321641569 type Work @default.
- W4321641569 citedByCount "0" @default.
- W4321641569 crossrefType "proceedings-article" @default.
- W4321641569 hasAuthorship W4321641569A5047877300 @default.
- W4321641569 hasConcept C104111718 @default.
- W4321641569 hasConcept C105487726 @default.
- W4321641569 hasConcept C119599485 @default.
- W4321641569 hasConcept C127413603 @default.
- W4321641569 hasConcept C138331895 @default.
- W4321641569 hasConcept C14580979 @default.
- W4321641569 hasConcept C165801399 @default.
- W4321641569 hasConcept C172385210 @default.
- W4321641569 hasConcept C192562407 @default.
- W4321641569 hasConcept C204223013 @default.
- W4321641569 hasConcept C41008148 @default.
- W4321641569 hasConcept C46362747 @default.
- W4321641569 hasConcept C49040817 @default.
- W4321641569 hasConcept C7366592 @default.
- W4321641569 hasConceptScore W4321641569C104111718 @default.
- W4321641569 hasConceptScore W4321641569C105487726 @default.
- W4321641569 hasConceptScore W4321641569C119599485 @default.
- W4321641569 hasConceptScore W4321641569C127413603 @default.
- W4321641569 hasConceptScore W4321641569C138331895 @default.
- W4321641569 hasConceptScore W4321641569C14580979 @default.
- W4321641569 hasConceptScore W4321641569C165801399 @default.
- W4321641569 hasConceptScore W4321641569C172385210 @default.
- W4321641569 hasConceptScore W4321641569C192562407 @default.
- W4321641569 hasConceptScore W4321641569C204223013 @default.
- W4321641569 hasConceptScore W4321641569C41008148 @default.
- W4321641569 hasConceptScore W4321641569C46362747 @default.
- W4321641569 hasConceptScore W4321641569C49040817 @default.
- W4321641569 hasConceptScore W4321641569C7366592 @default.
- W4321641569 hasLocation W43216415691 @default.
- W4321641569 hasOpenAccess W4321641569 @default.
- W4321641569 hasPrimaryLocation W43216415691 @default.
- W4321641569 hasRelatedWork W1617729324 @default.
- W4321641569 hasRelatedWork W2136084319 @default.
- W4321641569 hasRelatedWork W2141909381 @default.
- W4321641569 hasRelatedWork W2464789432 @default.
- W4321641569 hasRelatedWork W2538806931 @default.
- W4321641569 hasRelatedWork W2899084033 @default.
- W4321641569 hasRelatedWork W4321264268 @default.
- W4321641569 hasRelatedWork W4321641569 @default.
- W4321641569 hasRelatedWork W2090796459 @default.
- W4321641569 hasRelatedWork W2108162612 @default.
- W4321641569 isParatext "false" @default.
- W4321641569 isRetracted "false" @default.
- W4321641569 workType "article" @default.