Matches in SemOpenAlex for { <https://semopenalex.org/work/W432237406> ?p ?o ?g. }
Showing items 1 to 45 of
45
with 100 items per page.
- W432237406 abstract "Chemical vapor deposition (CVD) process composes a complex system, where chemical reaction and heat and mass transfer interact with each other. And these macro-scale phenomena are deeply related to the micro-scale mechanics. Hence, multi-scale analysis is required to understand these complicated interactions. In the previous report, the practical methodology for the multi-scale analysis of reactive rarefied gas flow was proposed. And as the first step of the analysis, the new pair potential model of SiH4 molecule was constructed using ab initio molecular orbital calculations. However, the interactions between SiH4 and other species were not considered in the previous report though SiH4 is seeded into buffer gas in the most of the processes. Hence, we extend the potential model to SiH4/H2 system in this report. First, the potential parameters for Si-H and H-H interaction are determined by the molecular orbital calculations of SiH4-H2 pair. Next, the Si-Si parameters are determined from the SiH4-SiH4 pair. In this manner, the new pair potential model that has the common parameter to SiH4-H2 and SiH4-SiH4 interaction is constructed. The validity of the model is evaluated from the calculation of SiH4 viscosity by the molecular dynamics simulations. The result shows the good agreement between the experiments and the model." @default.
- W432237406 created "2016-06-24" @default.
- W432237406 creator A5024536498 @default.
- W432237406 creator A5031589727 @default.
- W432237406 creator A5052941436 @default.
- W432237406 date "2003-01-01" @default.
- W432237406 modified "2023-10-04" @default.
- W432237406 title "Multi-scale Analysis for CVD Processes(2nd Report, Extension of Intermolecular Potential Model)" @default.
- W432237406 doi "https://doi.org/10.1299/kikaib.69.1021" @default.
- W432237406 hasPublicationYear "2003" @default.
- W432237406 type Work @default.
- W432237406 sameAs 432237406 @default.
- W432237406 citedByCount "0" @default.
- W432237406 crossrefType "journal-article" @default.
- W432237406 hasAuthorship W432237406A5024536498 @default.
- W432237406 hasAuthorship W432237406A5031589727 @default.
- W432237406 hasAuthorship W432237406A5052941436 @default.
- W432237406 hasBestOaLocation W4322374061 @default.
- W432237406 hasConcept C121332964 @default.
- W432237406 hasConcept C147597530 @default.
- W432237406 hasConcept C159467904 @default.
- W432237406 hasConcept C178790620 @default.
- W432237406 hasConcept C185592680 @default.
- W432237406 hasConcept C2778755073 @default.
- W432237406 hasConcept C32909587 @default.
- W432237406 hasConcept C57410435 @default.
- W432237406 hasConcept C59593255 @default.
- W432237406 hasConcept C62520636 @default.
- W432237406 hasConceptScore W432237406C121332964 @default.
- W432237406 hasConceptScore W432237406C147597530 @default.
- W432237406 hasConceptScore W432237406C159467904 @default.
- W432237406 hasConceptScore W432237406C178790620 @default.
- W432237406 hasConceptScore W432237406C185592680 @default.
- W432237406 hasConceptScore W432237406C2778755073 @default.
- W432237406 hasConceptScore W432237406C32909587 @default.
- W432237406 hasConceptScore W432237406C57410435 @default.
- W432237406 hasConceptScore W432237406C59593255 @default.
- W432237406 hasConceptScore W432237406C62520636 @default.
- W432237406 hasLocation W4322374061 @default.
- W432237406 hasOpenAccess W432237406 @default.
- W432237406 hasPrimaryLocation W4322374061 @default.
- W432237406 isParatext "false" @default.
- W432237406 isRetracted "false" @default.
- W432237406 magId "432237406" @default.
- W432237406 workType "article" @default.